| Total Travel |
500 mm x
500 mm
(20 in x 20 in) |
750 mm x
750 mm
(30 in x 30 in) |
1000 mm x
1000 mm
(40 in x 40 in) |
1250 mm x
1250 mm
(50 in x
50 in) |
| Drive System(1) |
Lower Axis |
Linear
Brushless Servomotor — Dual BLM-386-A or Dual BLMH-382-A |
| Upper Axis |
Linear
Brushless Servomotor — BLM-264-A |
| Bus Voltage |
Up to 340
VDC |
| Feedback |
Noncontact
Linear Encoder |
| Resolution(2) |
0.001
µm - 1.0 µm (0.04 µin - 40 µin) |
| Maximum Travel Speed(3) |
3 m/s
(120 in/s) |
| Maximum Linear Acceleration |
5 g (50
m/s2) (no-load) |
| Maximum Load(4) |
40.0 kg
(88.2 lb) |
| Accuracy(5,6) |
±1.5 µm
(±60 µin) |
±2.0 µm
(±80 µin) |
±2.5 µm
(±100 µin) |
±3.0 µm
(±120 µin) |
| Repeatability |
±0.5 µm
(±20 µin) |
±0.75 µm
(±30 µin) |
±1.0 µm
(±40 µin) |
±1.25 µm
(±50 µin) |
| Orthogonality |
5 arc sec |
| Moving Mass |
Lower Axis |
62.0 kg |
72.3 kg |
82.5 kg |
92.7 kg |
| Upper Axis |
7.2 kg |
| Material |
Aluminum |
| Finish |
Stage |
Black
Anodize; ESD Optional |
| Carriage |
Hard
Coating; ESD Optional |
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