Aerotech’s AirLift 115 series stages offer the ideal solution
for applications that require very stringent Z direction
positioning while maintaining extremely tight angular
performance over full travel. Applications include
semiconductor wafer inspection and testing, noncontact
metrology, optical inspection systems, and laser processing
applications.
Unique Design
Aerotech’s AirLift 115 was designed to address the most
significant limitation of conventional wedge-style vertical
lift stages – angular performance. Although wedge-style Z
stages provide a compact below-the-work-plane solution,
they typically have limited pitch and roll stiffness that
limits their angular performance. The AirLift 115’s unique
air-bearing design provides superior angular performance
over larger travels while utilizing an innovative drive
mechanism that eliminates the need for counterbalance
mechanisms.
The AirLift 115 directly addresses applications where:
• Tight angular performance is required over travel ranges that are too large for traditional wedge-style Z stages (e.g., 50 mm)
• An unobstructed view of the work plane is desired
• Footprint must be kept to a minimum
• A failsafe brake is required
Motors and Drives
Included with the AirLift 115 series stages are Aerotech’s
BMS series brushless rotary motors. This motor has all of
the advantages of a brushless motor – high acceleration, no
brushes to wear, and lower heating – yet has zero cogging
for extremely smooth motion and accuracy. Aerotech
manufactures a wide range of matching drives and controls
to provide a fully integrated and optimized motion solution.
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