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| Travel |
50 mm |
100 mm |
150 mm |
| Accuracy(1) |
Standard |
±2.0 µm |
±4.0 µm |
±6.0 µm |
| HALAR |
±1.0 µm |
±1.25 µm |
±1.5 µm |
| Resolution |
0.05 µm |
| Repeatability
(Bidirectional) (1) |
±0.5 µm |
| Straightness(2) |
±0.25 µm |
±0.35 µm |
±0.45 µm |
| Pitch(2) |
±1 arc
sec |
±1.25 arc
sec |
±2 arc
sec |
| Roll(2) |
±1 arc
sec |
±1.25 arc
sec |
±2 arc
sec |
| Yaw(2) |
±1 arc
sec |
±1.25 arc
sec |
±2 arc
sec |
| Maximum
Speed |
5 mm/rev |
50 mm/s |
| Maximum
Acceleration |
0.25 g |
| Load
Capacity(3) |
Vertical |
15 kg |
| Operating
Pressure |
80 psi |
| Air
Consumption |
≤40
slpm |
| Material |
Aluminum |
| MTBF
(Mean
Time Between Failure) |
15,000
Hours |
Notes:
1.
Certified with each stage.
2.
Specifications are for centered load. Other loading configurations will affect
specifications.
3. Axis
orientation for on-axis loading is listed.
4.
Specifications are for single-axis systems measured 25 mm above the tabletop.
Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
5. To
protect air bearing against under-pressure condition, an in-line pressure
switch tied to the motion controller is required.
6. Air
supply must be clean, dry to 0°F dew point, and filtered to 0.25 µm or better.
| Drive
System |
Brushless
Rotary Servomotor |
| Feedback |
Noncontact
Linear Encoder |
| Maximum
Bus Voltage |
up to 160
VDC |
| Limit
Switches |
5 V,
Normally Closed |
| Multi-Axis |
A3200 |
Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR |
| Ensemble |
Ensemble
MP/Ensemble CP/Ensemble HLe/Epaq |
| Single
Axis |
Soloist |
Soloist
MP/Soloist CP/Soloist HLe |
Notes:
1. Linear
amplifiers are required to achieve the listed specifications. Other options are
available.

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