|
Ordering Information |
| ANT-4V |
4
mm (0.157 in) vertical travel lift stage with proprietary
direct-drive motor technology, effective 4 micron pitch
sinusoidal output linear encoder and limits; 1 meter cable
with 25-pin D connector |
| |
|
| ANT-4V-20RA |
20
degree rotary travel stage with proprietary direct-drive
motor technology, limits, and sinusoidal linear encoder
with 85 arc sec resolution (before multiplication); includes
4 mm (0.157 in) vertical travel lift stage with proprietary
direct-drive motor technology, 4 micron pitch sinusoidal
output linear encoder and limits; tabletop options include
STD (standard) for four- and five-axis versions, and G90
for six-axis versions. Also, the six-axis version is available
with the MP-420 option, a breadboard mounting plate. |
| |
|
|
Accessories |
|
MXH5-D-mm
|
20-times multiplier, 32 MHz max, 200 nm resolution
|
| MXH10-D-mm |
40-times
multiplier, 32 MHz max, 100 nm resolution |
| MXH25-D-mm |
100-times
multiplier, 32 MHz max, 40 nm resolution |
| MXH50-D-mm |
200-times
multiplier, 32 MHz max, 20 nm resolution |
| MXH100-D-mm |
400-times
multiplier, 32 MHz max, 10 nm resolution |
| MXH200-D-mm |
800-times
multiplier, 32 MHz max, 5 nm resolution |
| MXH250-D-mm |
1000-times
multiplier, 32 MHz max, 4 nm resolution |
| MXH500-D-mm |
2000-times
multiplier, 32 MHz max, 2 nm resolution |
| MXC-nn |
Multiplier
to controller cable; specify length '-nn' in feet |
| Note:
Specify data rate "mm" 2 M=2 MHz, 4 M=4 MHz, 8
M=8 MHz, 16 M=16 MHz, 32 M=32 MHz (MXH only) |
| HALAR |
High
accuracy system – linear error correction for accuracy
and repeatability |
| ALIGNMENT-NPA |
Non-precision
XY assembly |
| ALIGNMENT-PA10 |
XY
assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 |
XY
assembly; 5 arc sec orthogonal |