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| Travel |
25 mm |
| Drive
System |
Linear
brushless servomotor (BLMUC-79-A) |
| Bus Voltage |
up
to 80 VDC |
| Continuous
Current |
Apk |
3.1 |
| Arms |
2.2 |
| Feedback |
Noncontact
linear encoder |
| Resolution |
0.0045 µm - 1.0 µm (Effective
18 µm pitch encoder) |
| Maximum
Travel Speed |
100
mm/s (4 in/s) |
| Maximum
Linear Acceleration |
1.0
g |
| Maximum
Load |
Horizontal |
7.0
kg (15.4 lb) |
| Side |
3.5
kg (7.7 lb) |
| Accuracy |
Standard |
±15.0
µm (±160 µin) |
| HALAR(1) |
±2.0
µm |
| Repeatability |
±300 nm |
| Straightness |
Max |
±3
µm |
| Pitch
and Roll |
±15
arc sec |
| Yaw |
±15
arc sec |
| Nominal
Stage Weight |
4.0 kg (8.8 lb) |
| Moving
Mass |
1.6 kg (3.6 lb) |
| Construction |
Aluminum body/black anodize finish/hardcoat |
Note:
1. Requires Aerotech controls and HAL option.
2. Includes air pneumatic counterbalance. Must supply 80 psi of
clean, dry air to 0°F dew point, and filtered to 0.25 µm
or better.
3. For inverted operation, consult factory.
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