|
|
|
| ANT-4V
Vertical Lift Stage |
AVL125
Vertical Lift Stage |
AVL1000
Vertical Lift Stage |
US
Patent 5,731,641 Others Pending
The ANT-4V represents a significant breakthrough in vertical
alignment of high-precision components. This unique, patented
device incorporates the best high-performance features: high
speed (50 mm per second), high resolution (1 nm), superior
in-position stability (4 nm), and high accuracy (400 nm),
in one compact package.
Click
here for
complete product information. |
US
Patent 5,731,641 Others Pending
The AVL125 combines a noncontact linear motor drive, high-accuracy
encoder, and MXH multiplier for 9 nm resolution in additon
to high speed and accuracy.
Click
here for
complete product information. |
The
AVL1000 utilizes a wedge design mounted on high stiffness
bearings to achieve high lateral and rotational rigidity.
All elements of the AVL1000 were selected to operate in a
24/7 industrial environment and, unlike screw- or piezo-based
vertical stages, the AVL1000 requires no maintenance and will
ensure years of trouble-free operation.
Click
here for
complete product information. |
| Travel
|
4
mm |
| Velocity |
50
mm/s |
| Load |
2
kg |
|
| Travel
|
25
mm |
| Velocity |
100
mm/s |
| Load |
7
kg |
|
| Travel
|
2
mm |
| Velocity |
5
mm/s |
| Load |
50
kg |
|
|
 |
|
| AVS100/AVSI100
Vertical Lift Stage |
WaferMax
Z |
|
Aerotech's
AVS100/AVSI100 series stages offer the ideal solution for
applications that require very small incremental movements
in elevation above a horizontal plane. Their small profiles
and precise motion capability make these stages ideal for
use in semiconductor wafer inspection and testing, fiber optics
assembly and inspection, automated tool alignment, machine
vision inspection systems, and laser machining applications.
Click
here for
complete product information. |
The WaferMax Z represents a significant breakthrough in vertical
alignment of high-precision components in one compact package.
Its superior noncontact linear motor drive employs a high-accuracy
encoder for direct position feedback.
Click
here for
complete product information. |
|
| Travel
|
6,
13, 25 mm |
| Velocity |
50
mm/s |
| Load |
25
kg |
|
Travel |
5
mm |
Velocity |
4
mm/s |
Load |
10
kg |
|
|
United
States [Change]
