Home >> Vertical Lift Stages Selection Guide

ANT-95-3-V Series Vertical Lift Stage

ANT-130-5-V Series Vertical Lift Stage

ANT-4V Vertical Lift Stage

Aerotech’s ANT95 series stages are the world’s first nanometer-level positioning systems with multi-millimeter travel. The ANT95-3-V and ANT95-3-V-PLUS are linear-motor-driven wedge-style vertical lift stages. The stage is designed to be seamlessly integrated with other stages in the ANT95 family for superior multi-axis performance.

Click here for complete product information.

Aerotech’s ANT130 series stages are the world’s first nanometer-level positioning systems with multi-millimeter travel. The ANT130-5-V and ANT130-5-V-PLUS are linear-motor-driven wedge-style vertical lift stages. The stage is designed to be seamlessly integrated with other stages in the ANT130 family for superior multi-axis performance.

Click here for complete product information.

US Patent 5,731,641 Others Pending

The ANT-4V represents a significant breakthrough in vertical alignment of high-precision components. This unique, patented device incorporates the best high-performance features: high speed (50 mm per second), high resolution (1 nm), superior in-position stability (4 nm), and high accuracy (400 nm), in one compact package.

Click here for complete product information.

WaferMax Z Vertical Lift Stage

US Patent 5,731,641 Others Pending

The AVL125 combines a noncontact linear motor drive, high-accuracy encoder, and MXH multiplier for 9 nm resolution in additon to high speed and accuracy.

Click here for complete product information.

The AVL1000 utilizes a wedge design mounted on high stiffness bearings to achieve high lateral and rotational rigidity. All elements of the AVL1000 were selected to operate in a 24/7 industrial environment and, unlike screw- or piezo-based vertical stages, the AVL1000 requires no maintenance and will ensure years of trouble-free operation.

Click here for complete product information.

The WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encoder for direct position feedback.

Click here for complete product information.

AVS1000 Vertical Lift Stage

Aerotech’s AVS1000 series stages offer the ideal solution for applications that require moving large or heavy loads over very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems, and laser machining applications.

Click here for complete product information.

Aerotech's AVS100/AVSI100 series stages offer the ideal solution for applications that require very small incremental movements in elevation above a horizontal plane. Their small profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fiber optics assembly and inspection, automated tool alignment, machine vision inspection systems, and laser machining applications.

Click here for complete product information.

The ANT95 series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-L-Z and ANT95-L-Z-PLUS crossroller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability, and size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

Click here for complete product information.

ABL1500Z Air Bearing, Linear Motor Vertical Lift Stage

Airlift 115 Air-Bearing Vertical Lift Stage

The ANT130 series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT130-L-Z and ANT130-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability, and size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

Click here for complete product information.

The ABL1500Z is a vertical translation version of the ABL1500 series air-bearing stage. The ABL1500Z is ideally suited for applications with large offset loads and where extreme accuracy is required.

Click here for complete product information.

Aerotech’s AirLift 115 series stages offer the ideal solution for applications that require very stringent Z direction positioning while maintaining extremely tight angular performance over full travel. Applications include semiconductor wafer inspection and testing, noncontact metrology, optical inspection systems, and laser processing applications.

Click here for complete product information.

VTS300 Vertical Translation Stage

Aerotech’s VTS300 accurately positions loads up to 450 kg (1000 lb), and the small volume allows the positioning of high loads in space-constricted applications. Typical applications range from step and settle placement to large force generation. Multiple units can be combined for lift and tip/tilt motion.


Click here for complete product information.