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FiberAlign®
130 Ultra-Stable Series |
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Total Travel |
150 mm x 150 mm x 25 mm |
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Drive System |
Linear Brushless Servomotor |
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Feedback |
Noncontact Linear Encoder |
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Resolution |
2.5 nm (300 picometers with Automation 3200) |
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Maximum Travel Speed |
100 mm/s |
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Maximum Load(1) |
10 kg |
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Accuracy(2) |
±0.3 µm per axis(2); ±3 µm |
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Bidirectional Repeatability |
±100 nm |
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Orthogonality |
5 arc sec |
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Finish |
Electroless nickel |
Notes:
1. Three-axis configuration.
2. Values with Aerotech controls and HAL option. 3. See drawing
on page 27 for outline dimensions

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