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FiberAlign®
90 and 130 Series |
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Total Travel |
50 mm x 50 mm x 25 mm |
150 mm x 150 mm x 25 mm |
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Drive System |
Linear Brushless Servomotor |
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Feedback |
Noncontact Linear Encoder |
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Resolution |
2.5 nm |
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Maximum Travel Speed |
100 - 250 mm/s |
150 mm/s |
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Maximum Load(1) |
5.0 kg |
10.0 kg |
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Accuracy(2) |
±0.3 µm per axis(2); ±3 µm |
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Bidirectional Repeatability |
±100
nm |
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Orthogonality |
10 arc sec |
5 arc sec |
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Material |
Aluminum |
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Finish |
Black Anodize |
Notes:
1. Three-axis configuration.
2. Values with Aerotech controls and HAL options
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