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Home >> Photonics and Fiberoptics Nanopositioners >> Linear, Air Bearing Subsystem
   
FiberGrate 2000® Series
Description
   

Basic Model

FiberGrate 2000
Total Travel 100 mm to 1.2 m (4 in to 48 in)
Drive System Linear Brushless Servomotor - BLMC-192-A
Feedback Laser Interferometer (LZR) or Noncontact Linear Encoder (LN or LT)
Resolution LZR 0.3 nm - 79 nm (0.012 µin - 3.2 µin)
LN 2 nm (0.08 µin)
LT 10 nm (0.4 µin)
Maximum Travel Speed(1) 500 mm/s (20 in/s)
Maximum Load 40.0 kg (90.0 lb)
Overall Accuracy LZR ±1.5 ppm
LN(2) ±0.5 µm (±20 µin) - ±1.0 µin (±40 µin)
LT(2) ±1 µm (±40 µin) - ±2 µin (±80 µin)
Repeatability LZR ±5 nm (±0.2 µin)
LN ±0.05 µm (±2 µin) - ±0.2 µin (±8 µin)
LT ±0.1 µm (±4 µin) - ±0.4 µin (±16 µin)
Straightness and Flatness Differential ±0.25 µm/25 mm (±10 µin/1 in)
Maximum Deviation ±0.25 µm (±10 µin) - ±5.0 µm (±200 µin)
Pitch/Roll/Yaw ±0.25 µm/25 mm
Operating Pressure(3) 80 psi ±5 psi
Air Consumption(4) <1 cfm @ 80 psi
Granite 150 mm to 200 mm thickness laboratory grade
Isolation System Air Isolation System
Notes:
1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
2. With Aerotech controller.
3. To protect air bearing against under-pressure, an in-line pressure switch is required and tied to the controller E-stop input.
4. Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 µm or better; recommend nitrogen at 99.99% purity






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Aerotech is a motion controller and motion control systems manufacturer.