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Three Axis, Linear Air-Bearing Stage

FiberGlide 3D Series

Browse Photonics Postioners

Description

Specifications

Dimensions

Order Information

Basic Model		FiberGlide 3D
Total Travel		25 mm	50 mm	100 mm	150 mm
Drive System		Linear Brushless Servomotor
Bus Voltage		up to 160 VDC
Continuous Current	A _pk	up to 2.9 A
	A _rms	up to 2.1 A
BEMF, line-line, max.	V/m/sec	3.77952
	V/in/sec	0.096
Force Constant, Sinusoidal Drive	N/A(lb/A), _pk	3.29 (0.739)
	N/A(lb/A), _rms	4.65 (1.04)
Resistance, 25°C, line-line	Ohms	5.2
Resistance, 125°C, line-line	Ohms	7.28
Inductance, line-line	mH	0.7
Magnetic Pole Pitch	mm (inch)	16 (0.63)
Feedback		Noncontact Linear Encoder
Resolution	LN	1 nm
	LT	5 nm
Maximum Travel Speed⁽¹⁾		300 mm/s
Maximum Linear Acceleration		1 g -10 m/s² (no load)
Maximum Load⁽²⁾	Horizontal	15.0 kg
Accuracy	LN	±0.2 μm⁽³⁾ ±1 μm	±0.2 μm⁽³⁾ ±1 μm	±0.2 μm⁽³⁾ ±2 μm	±0.5 μm⁽³⁾ ±5 μm
	LT	±0.3 μm⁽³⁾ ±2 μm	±0.3 μm⁽³⁾ ±2 μm	±0.3 μm⁽³⁾ ±5 μm	±0.5 μm⁽³⁾ ±5 μm
Repeatability	LN⁽³⁾	±50 nm
	LT	±50 nm⁽³⁾; ±100 nm
Straightness and Flatness⁽⁴⁾	Differential	0.25 μm/25 mm
	Max Deviation	±0.25 μm	±0.25 μm	±0.4 μm	±0.4 μm
Pitch and Yaw		±0.25 arc sec/25 mm	±0.25 arc sec/25 mm	±0.25 arc sec/25 mm	±1.5 arc sec/25 mm
Nominal Stage Weight		4.5 kg	5.5 kg	6.4 kg	12.7 kg
Moving Mass		1.9 kg			4.8 kg
Operating Pressure⁽⁵⁾		80 psi ±5 psi
Air Consumption⁽⁶⁾		<0.3 cfm @ 80 psi
Construction		Aluminum Body/Hardcoat

Notes:
1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
2. Max load for XY configuration is 10.0 kg.
3. Values with Aerotech controls and HAL option.
4. Dependent on flatness of stage mounting surface.
5. To protect air bearing against under-pressure, an in-line pressure switch is required and tied to the contoller E-stop input.
6. Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 µm or better; recommend nitrogen at 99.99% purity.

Downloads

  PDF File
  CAD Drawing
  Manual

Supporting Products

Motion Controllers

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Aerotech is a motion controller and motion control systems manufacturer.