|
Optical Axis Height |
130 mm |
|
Length x Width x Height |
224 mm x 150 mm x 130 mm |
|
Travel |
25 mm (X) x 25 mm (Z) x 4 mm (Y) x 20° (T) |
|
Resolution |
10 nm ZX (300 pm)(1); 2 nm Y (60 pm)(1);
0.045 arc sec T (0.0014 arc sec)(1) |
|
Accuracy(2) |
±0.3 µm per axis(4) |
|
Repeatability |
±50 nm(2); ±100 nm |
|
Velocity |
100-250 mm/s XZ; 50 mm/s Y; 150°/s yaw |
|
Load |
2 kg |
Notes:
1. With Aerotech Automation 3200 controller.
2. Values with Aerotech controls and HAL option.
T=Rotation about Y axis (yaw)
P=Rotation about X axis (pitch)
R=Rotation about Z axis (roll)
System Characteristics
Outstanding accuracy, position repeatability, and inposition
stability requires high system resolution. FiberMax’s industry-leading
2.5 nanometer closed-loop resolution provides this high level
of performance. Advanced, patent pending, real-time axis calibration
systems for all axes allow the highest level of system accuracy.
High-speed 32 megahertz electronic circuitry enables extremely
fast positioning even at 2.5 nanometer resolution. Excellent in-position
stability, assisted by highquality, no-creep linear bearings,
enables virtually maintenance-free operation over the life of
the product.
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