|
Optical Axis Height |
168 mm |
|
Length x Width x Height |
224 mm x 150 mm x 168 mm |
|
Travel |
25 mm x 25 mm x 4 mm x 20° x 20° |
|
Resolution |
10 nm ZX (300 pm)(1); 2 nm Y (60 pm)(1);
0.045 arc sec T (0.0014 arc sec)(1);
0.058 arc sec (0.0018 arc sec)(1) ANT-20G-50
or
0.027 arc sec (0.00082 arc sec)(1) ANT-20G-90
P,R |
|
Accuracy(2) |
±0.3 µm per axis(2) |
|
Repeatability |
±50 nm(2); ±100 nm |
|
Velocity |
100-250 mm/s XZ; 50 mm/s Y; 150°/s T, P, or R |
|
Load |
2 kg |
Notes:
1. With Aerotech Automation 3200 controller.
2. Values with Aerotech controls and HAL option.
T=Rotation about Y axis (yaw)
P=Rotation about X axis (pitch)
R=Rotation about Z axis (roll)
System Characteristics
By incorporating Aerotech’s advanced direct-drive, noncontact,
high-resolution goniometer (ANT-20G), further improvements or
flexibility in optical component adjustment can be achieved. The
ANT-20G can be field or factory mounted to the tabletop in either
of two directions, enabling the component to be rotated either
about the Z optical axis (roll) or the X linear axis (pitch).
This versatile, low-profile device offers high resolution (0.058
with the ANT-20G-50 or 0.027 with the ANT-20G-90), high positioning
speed (150º per second), excellent in-position stability,
and a large 20º angular range to facilitate high throughput
24/7 manufacturing.
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