|
Optical Axis Height |
206 mm or 168 mm |
|
Length x Width x Height |
224 mm x 150 mm x 206 mm or 168 mm |
|
Travel |
25 mm x 25 mm x 4 mm x 20° x 20° x 20° |
|
Resolution |
10 nm ZX (300 pm)(1); 2 nm Y (60 pm)(1);
0.045 arc sec T (0.0014 arc sec)(1);
0.058 arc sec (0.0018 arc sec)(1) ANT-20G-50 or
0.027 arc sec (0.00082 arc sec)(1) ANT-20G-90 P,R |
|
Accuracy(2) |
±0.3 µm per axis(4) |
|
Repeatability |
±50 nm(2); ±100 nm |
|
Velocity |
100-250 mm/s XZ; 50 mm/s Y; 150°/s T, P, or R |
|
Load |
2 kg |
Notes:
1. With Aerotech Automation 3200 controller.
2. Values with Aerotech controls and HAL option.
T=Rotation about Y axis (yaw)
P=Rotation about X axis (pitch)
R=Rotation about Z axis (roll)
System Characteristics
In those cases where a sixth axis is required, the versatile FiberMax
construction permits two different approaches. In one configuration,
stacked ANT-20G goniometers can easily be mounted to the horizontally
rotating tabletop, thus creating three rotating axes (T, P, and
R). Alternately, one goniometer can be separately mounted on an
adjacent stand or shuttle, lowering overall height. When the FiberMax
is purchased with the Zero-Z option, the optical axis height can
be set virtually any distance above or at the same height as the
general mounting surface. This unique feature significantly lowers
the complexity of optical component mounting and accessibility.
|
United
States [Change]
