Introduction
Aerotech’s MaskAlign series stage is a high-performance
photomask-aligning system designed to meet the exacting requirements
of advanced semiconductor and flat panel writing systems. The
MaskAlign incorporates proprietary drive technology and offers
best-in-class speed, resolution, accuracy, and repeatability.
Mask Alignment and Retention
The MaskAlign has a built-in alignment system that guarantees
proper mask placement with minimal effort. Fixed pins are used
to set the mask location while two locating mechanisms push the
mask into its final position. Once the mask is properly aligned,
an integral vacuum channel holds the mask in place. All of these
features assure proper mask alignment and retention during the
writing process.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate,
and high-speed positioning necessary for mass production of precision
devices. The X and Y axes use Aerotech’s brushless linear
motors for non-cogging, noncontact, high-performance positioning.
The theta axis uses a proprietary curvilinear motor based on Aerotech’s
world-class linear motors. This complete direct-drive solution
ensures a robust system with the highest performance available.
Precision Positioning
With linear resolution options to 10 nm and rotary resolution
of 0.017 arc sec, the MaskAlign can meet the needs of even the
most demanding applications.
The compact integrated design has an inherent advantage over stacked
systems — since the overall height is reduced, so are the
effects of Abbe error. But even with a compact design, the MaskAlign
still provides up to 150 mm of xy motion and 20 degrees of theta
motion.
The MaskAlign also uses a very flexible cable management system
(CMS). The horizontal CMS allows larger bend radii which significantly
increases cable life while at the same time minimizes total overall
height. This system also makes all interconnections very simple
and straightforward. This is accomplished with a single bracket
that keeps all electrical and pneumatic connectors in one convenient
location.
Robust Design
Aerotech has a long history of designing and building motion control
and positioning components, as well as complete positioning systems.
This knowledge is applied to each of our components and systems,
resulting in robust designs that are meant to function continuously
in a production environment.
Flexible Configurations and Custom Designs
Aerotech manufactures a wide range of servo amplifiers and advanced
controllers to provide a complete, integrated package. In addition,
custom systems are routinely designed, manufactured, tested, and
certified to customer specifications.
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