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| Travel |
100 mm (upper axis) |
100 mm (lower axis) |
20 degrees |
| Aperture |
120 mm square with XY stage at mid-travel; 70 mm square with
XY stage at extents of travel |
| Motor Type
|
BLMUC-111-A (single motor) |
BLMUC-143-A (single motor) |
Custom BLMUC-111-A (curvilinear) |
| Resolution(1) |
10 nm |
10 nm |
0.017 arc sec |
| Accuracy(2) |
±1 µm |
±1µm |
±1.5 arc sec |
| Repeatability(2) |
±0.5 µm |
±0.5 µm |
±0.5 arc sec |
| Straightness
|
±1.5 µm |
±1.5 µm |
NA |
| Flatness |
±1.5 µm |
±1.5 µm |
NA |
| Pitch (arc
sec) |
±4 arc sec |
±4 arc sec |
NA |
| Yaw (arc sec) |
±4 arc sec |
±4 arc sec |
NA |
| Maximum Load |
2 kg |
| XY Orthogonality |
5 arc sec |
| Moving Mass |
8.8 kg |
14.6 kg |
NA |
| Stage Mass |
19 kg |
Note:
1. Based on use of MXH500 multiplier
2. Values with Aerotech controls and HALAR calibration
| Travel |
150 mm (upper axis) |
150 mm (lower axis) |
20 degrees |
| Aperture |
170 mm square with XY stage at mid-travel; 70 mm square with
XY stage at extents of travel |
| Motor Type
|
BLMUC-111-A (single motor) |
BLMUC-143-A (single motor) |
Custom BLMUC-111-A (curvilinear) |
| Resolution(1) |
10 nm |
10 nm |
0.017 arc sec |
| Accuracy(2) |
±1 µm |
±1 µm |
±1.5 arc sec |
| Repeatability(2) |
±0.5 µm |
±0.5 µm |
±0.5 arc sec |
| Straightness
|
±2.5 µm |
±2.5 µm |
NA |
| Flatness |
±2.5 µm |
±2.5 µm |
NA |
| Pitch (arc
sec) |
±6 arc sec |
±6 arc sec |
NA |
| Yaw (arc sec) |
±6 arc sec |
±6 arc sec |
NA |
| Maximum Load |
5 kg |
| XY Orthogonality |
5 arc sec |
| Moving Mass |
9.2 kg |
15.7 kg |
NA |
| Stage Mass |
22 kg |
Note:
1. Based on use of MXH500 multiplier
2. Values with Aerotech controls and HALAR calibration
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United
States [Change]
