Aerotech - Precision Positioning Systems and Motion Control. Since 1970, Aerotech has manufactured top quality motion control products and positioning systems to medical, industrial, research, educational, and government customers.
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Home >> Semiconductor Industry Tool Components >> Photomask-Alignment System
   
MaskAlign Series
Description
   

MaskAlign 100

Axis 1 (X)
Upper Linear Axis

Axis 2 (Y)
Lower Linear Axis

Axis 3 (Theta)
Travel 100 mm (upper axis) 100 mm (lower axis) 20 degrees
Aperture 120 mm square with XY stage at mid-travel; 70 mm square with XY stage at extents of travel
Motor Type BLMUC-111-A (single motor) BLMUC-143-A (single motor) Custom BLMUC-111-A (curvilinear)
Resolution(1) 10 nm 10 nm 0.017 arc sec
Accuracy(2) ±1 µm ±1µm ±1.5 arc sec
Repeatability(2) ±0.5 µm ±0.5 µm ±0.5 arc sec
Straightness ±1.5 µm ±1.5 µm NA
Flatness ±1.5 µm ±1.5 µm NA
Pitch (arc sec) ±4 arc sec ±4 arc sec NA
Yaw (arc sec) ±4 arc sec ±4 arc sec NA
Maximum Load 2 kg
XY Orthogonality 5 arc sec
Moving Mass 8.8 kg 14.6 kg NA
Stage Mass 19 kg
Note:
1. Based on use of MXH500 multiplier
2. Values with Aerotech controls and HALAR calibration


MaskAlign 150

Axis 1 (X)
Upper Linear Axis

Axis 2 (Y)
Lower Linear Axis

Axis 3 (Theta)
Travel 150 mm (upper axis) 150 mm (lower axis) 20 degrees
Aperture 170 mm square with XY stage at mid-travel; 70 mm square with XY stage at extents of travel
Motor Type BLMUC-111-A (single motor) BLMUC-143-A (single motor) Custom BLMUC-111-A (curvilinear)
Resolution(1) 10 nm 10 nm 0.017 arc sec
Accuracy(2) ±1 µm ±1 µm ±1.5 arc sec
Repeatability(2) ±0.5 µm ±0.5 µm ±0.5 arc sec
Straightness ±2.5 µm ±2.5 µm NA
Flatness ±2.5 µm ±2.5 µm NA
Pitch (arc sec) ±6 arc sec ±6 arc sec NA
Yaw (arc sec) ±6 arc sec ±6 arc sec NA
Maximum Load 5 kg
XY Orthogonality 5 arc sec
Moving Mass 9.2 kg 15.7 kg NA
Stage Mass 22 kg
Note:
1. Based on use of MXH500 multiplier
2. Values with Aerotech controls and HALAR calibration



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Aerotech is a motion controller and motion control systems manufacturer.