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SolarScribe |
MaskAlign |
WaferMax
T |
The
SolarScribe automation series is the most comprehensive
photovoltaic panel scribing system available today. It includes
both mechanical and air-bearing versions of split-axis and
gantry-style systems for maximum application flexibility.
Click here for complete product information. |
Aerotech’s MaskAlign is a high-performance photomask-aligning
system designed to meet the exacting requirements of advanced
semiconductor and flat panel writing systems.
Click here for complete product information. |
Aerotech’s
Wafermax T rotary stage is an excellent choice for applications
that require high performance in a low-height package. Originally
designed for the demands of precision wafer inspection, the
Wafermax T stack-up benefits have been applied to a multitude
of applications. A standard 25 mm aperture allows for easy
pass-through of vacuum lines where limited rotation is required.
Click here for
complete product information. |
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WaferMax
Z |
AVL1000
Vertical Lift Stage |
ARA1000
Rotary Actuator |
The WaferMax Z represents a significant breakthrough in vertical
alignment of high-precision components in one compact package.
Its superior noncontact linear motor drive employs a high-accuracy
encoder for direct position feedback.
Click here for
complete product information. |
The
AVL1000 utilizes a wedge design mounted on high stiffness
bearings to achieve high lateral and rotational rigidity.
All elements of the AVL1000 were selected to operate in a
24/7 industrial environment and, unlike screw- or piezo-based
vertical stages, the AVL1000 requires no maintenance and will
ensure years of trouble-free operation.
Click here for
complete product information. |
The
ARA1000 rotary actuator was designed for applications requiring
articulation for large payloads. It eliminates the mechanical
instability of high load inertia, multi-axis systems through
a proprietary design that significantly increases stage stiffness.
Click here for
complete product information. |
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| Wafer Chucks |
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To simplify system
development and reduce costs, Aerotech manufactures and integrates
high precision, custom engineered chucks. Custom designs include
those for 200, 300, and 450 mm wafers, as well as reticles and flat-panel displays.
Click here for
complete product information. |
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