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The SolarScribe automation series is the most comprehensive photovoltaic panel scribing system available today. It includes both mechanical and air-bearing versions of split-axis and gantry-style systems for maximum application flexibility.

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Aerotech’s MaskAlign is a high-performance photomask-aligning system designed to meet the exacting requirements of advanced semiconductor and flat panel writing systems.

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Aerotech’s Wafermax T rotary stage is an excellent choice for applications that require high performance in a low-height package. Originally designed for the demands of precision wafer inspection, the Wafermax T stack-up benefits have been applied to a multitude of applications. A standard 25 mm aperture allows for easy pass-through of vacuum lines where limited rotation is required.

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The WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encoder for direct position feedback.

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The AVL1000 utilizes a wedge design mounted on high stiffness bearings to achieve high lateral and rotational rigidity. All elements of the AVL1000 were selected to operate in a 24/7 industrial environment and, unlike screw- or piezo-based vertical stages, the AVL1000 requires no maintenance and will ensure years of trouble-free operation.

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The ARA1000 rotary actuator was designed for applications requiring articulation for large payloads. It eliminates the mechanical instability of high load inertia, multi-axis systems through a proprietary design that significantly increases stage stiffness.

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To simplify system development and reduce costs, Aerotech manufactures and integrates high precision, custom engineered chucks. Custom designs include chucks for 200 and 300 mm silicon wafers, as well as other substrates such as reticles and flat-panel displays.

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