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| Travel Options, Upper Axis(1) |
500
to 1500 mm |
500
to 1500 mm |
500
to 1500 mm |
500 to 1000
mm |
| Travel Options, Lower Axis(1) |
500
to 2500 mm |
500
to 2500 mm |
500
to 1700 mm |
500 to 1700
mm |
| Motor Type |
Linear
Brushless Servomotor |
| Encoder Options |
LT |
Noncontact
Linear Encoder; 20 μm Fundamental |
| LN |
Noncontact
Linear Encoder; 4 μm Fundamental |
| Maximum Speed(2) |
3
m/s |
2
m/s |
3
m/s |
1 m/s |
| Maximum Acceleration |
5 g |
1.5
g |
3 g |
0.5 g |
| Orthogonality |
5
arc sec |
|
|
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|
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|
|
Notes:
1. Custom travels available. Please contact an Aerotech sales representative
for details.
2. Maximum speed based on stage capability. Maximum application
velocity may be limited by system data rate and system resolution.


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