Aerotech - Precision Positioning Systems and Motion Control. Aerotech has over 33 years of experience as a manufacturer of top quality motion control products and positioning systems to medical, industrial, research, educational, and government customers.
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Home >> Semiconductor Industry Tool Components >> Brushless, Slotless, Direct-Drive Rotary Stage

   
WaferMax T
Description
   

Low profile for space-conscious applications

Direct-drive, brushless, slotless servomotor

Direct-coupled, high-accuracy rotary encoder

25 mm aperture

Optional rotary union for vacuum














Aerotech’s WaferMax T rotary stage is an excellent choice for applications that require high performance in a lowheight package. Originally designed for the demands of precision wafer inspection, the WaferMax T has been applied to a multitude of applications. A standard 25 mm aperture allows for easy pass-through of vacuum lines where limited rotation is required. If continuous rotation is necessary, an optional single or dual port rotary union can be incorporated. The tabletop includes a standard mounting pattern that allows for easy wafer-chuck mounting.

Superior Mechanical Design
Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness, and rotating friction. A thick-walled, precision-ground shaft further minimizes wobble.

Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a selfcontained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.

Brushless Direct-Drive
To maximize positioning performance, the WaferMax T utilizes Aerotech’s S-series brushless, slotless motor. This motor has all the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain, and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity, or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.

Accurate Positioning
Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.

Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.


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Aerotech is a motion controller and motion control systems manufacturer.