Aerotech’s WaferMax T rotary stage is an excellent choice
for applications that require high performance in a low-height
package. Originally designed for the demands of precision wafer
inspection, the WaferMax T has been applied to a multitude of
applications. A standard 25 mm aperture allows for easy pass-through
of vacuum lines where limited rotation is required. If continuous
rotation is necessary, an optional single or dual port rotary
union can be incorporated. The tabletop includes a standard mounting
pattern that allows for easy wafer-chuck mounting.
Superior Mechanical Design
Angular contact bearings are used to maximize performance with
respect to wobble, moment stiffness, and rotating friction. A
thick-walled, precision-ground shaft further minimizes wobble.
Cable management is a snap with integral motor power and feedback
connectors. Because the WaferMax T is a self-contained unit, it
can be integrated easily into multi-stage stacks. Either a service
loop or an integrated Aerotech cable management system (CMS) can
be provided for a highly reliable solution.
Brushless Direct-Drive
To maximize positioning performance, the WaferMax T utilizes Aerotech’s
S-series brushless, slotless motor. This motor has all of the advantages
of a brushless direct-drive motor — no brushes to wear,
no gear trains to maintain, and high acceleration and high speeds.
Since it is a slotless, ironless design, there is zero cogging,
meaning that there is absolutely no torque ripple. This makes
the WaferMax T ideal for applications requiring outstanding contoured
motion, smooth scan velocity, or precise incremental steps. The
low inertia and zero backlash make the WaferMax T the ideal solution
for applications requiring frequent directional changes.
Accurate Positioning
Performance is assured with a 10,000 lines per revolution encoder
that results in 0.065 arc sec resolution. A 2048 line option is
also available. The motor and high-performance rotary encoder
are directly coupled to a common shaft.
Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced
controllers to provide a complete, integrated package.
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