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WaferMax T

Ordering Example

WaferMax T

-RE2048AS

-RU

Encoder

Options

-RE2048AS
-RE10000AS

-RU1
-RU2
-GRND

WaferMax T Direct-Drive Rotary Stage

WaferMax T

Direct-drive rotary stage with 25 mm clear aperture

Encoder

-RE2048AS

Rotary encoder 2048 lines/rev; fundamental AS output

-RE10000AS

Rotary encoder 10000 lines/rev; fundamental AS output

WaferMax T Options

-RU1

Rotary union for feed-through of air/vacuum, single port

-RU2

Rotary union for feed-through of air/vacuum, dual port

-GRND

Adds grounding connection from tabletop