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Brushless, Slotless, Direct-Drive Rotary Stage

WaferMax T

Browse Semiconductor Tools

Description

Specifications

Dimensions

Order Information

WaferMax Theta
Travel		360 degrees, continuous
Tabletop Diameter		106.7 mm
Drive System		Direct drive brushless servomotor
Motor Type		S-180-44-A
Bus Voltage		up to 160 VDC
Continuous Current	A _pk	up to 2.7 A
	A _rms	up to 1.9 A
Encoder		2048 lines/rev fundamental; 10000 lines/rev fundamental
Resolution⁽¹⁾		0.32 arc sec; 0.065 arc sec
Accuracy⁽²⁾	HALAR	±25 μrad (±5 arc sec)
Repeatability (Bi-Directional)		±10 μrad (±2 arc sec)
Tilt Error Motion		97 μrad (20 arc sec)
Axial Error Motion		5 μm
Radial Error Motion		5 μm
Maximum Speed		400 rpm (unloaded)
Maximum Load⁽³⁾	Axial	40 kg
	Radial	20 kg
Inertia		0.008130 kg-m²
Mass		7.0 kg
Material		Aluminum
Finish		Black Anodize

Notes:
1. With 500 times multiplier. Higher resolutions available.
2. Available with Aerotech controllers.
3. Maximum loads are mutually exclusive.
4. Specifications are for single-axis systems, measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Downloads

  PDF File
  CAD Drawing
  Manual

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Aerotech is a motion controller and motion control systems manufacturer.