The WaferMax Z represents a significant breakthrough in vertical
alignment of high-precision components in one compact package.
Its superior noncontact linear motor drive employs a high-accuracy
encoder for direct position feedback. When combined with Aerotech’s
MXH multiplier, it offers 0.83 nm resolution in addition to high
speed and accuracy.
Superior Mechanical Design
Bearing elements are crossed-roller style for maximum smoothness
and reliability. These are mounted on an optimized base and wedge
assembly for stiffness and low mass/inertia, enhancing dynamic
performance.
All the critical elements of the WaferMax Z were selected to operate
in a 24/7 industrial environment and, unlike screw- or piezo-based
vertical stages, the WaferMax Z requires no maintenance and will
ensure years of trouble free operation.
Brushless Direct-Drive
To maximize positioning performance, the WaferMax Z utilizes Aerotech’s
BLMUC-series brushless, slotless linear motor. This motor has
all the advantages of a brushless direct-drive motor — no
brushes to wear, no gear trains to maintain, and high acceleration
and high speeds. Since it is a slotless, ironless design, there
is zero cogging, meaning that there is absolutely no torque ripple.
This makes the WaferMax Z ideal for contoured motion, smooth scan
velocity, or precise incremental steps.
Accurate Positioning
Performance is assured with a precision linear encoder that results
in 0.8 nm resolution. The motor and high- performance linear encoder
are directly coupled to increase accuracy.
Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced
controllers to provide a complete, integrated package.
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