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High-Precision, Vertical Alignment Stage

WaferMax Z

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Description

Specifications

Dimensions

Order Information

WaferMax Z
Travel		5 mm
Motor Type		Direct drive brushless linear servomotor
Bus Voltage		up to 160 VDC
Continuous Current	A _pk	up to 4.4 A
	A _rms	up to 3.1 A
Encoder		20 µm fundamental; amplified sine output
Resolution		0.83 nm
Accuracy	HALAR	±1.5 μm
Repeatability (Bi-Directional)		±0.3 μm
Straightness		±2 μm
Roll		20 arc sec
Pitch		20 arc sec
Yaw		20 arc sec
Maximum Speed		4 mm/s
Maximum Load		15 kg (requires use of integral pneumatic counterbalance)
Moving Mass		1.0 kg
Wedge Ratio		12:1
Stage Mass		4.2 kg
Material		Aluminum
Finish		Black anodize hard cover; Hard coat (62 Rockwell Hardness) tabletop

Notes:
1. Requires Aerotech controller.
2. For inverted operation, consult factory.

Downloads

  PDF File
  CAD Drawing
  Manual

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Aerotech is a motion controller and motion control systems manufacturer.