Aerotech's ASR series direct-drive spindles were designed to provide
superior angular positioning and velocity control for applications
including disk drive testing, imaging applications, and precision
wafer inspection.
Superior Mechanical Design
Matched angular contact bearing sets minimize spindle error motions.
In addition, the ASR2000 is balanced to ISO 1940 G 1.0 tolerances.
This unique design includes externally accessible balancing screws
that can be adjusted with final payload in place. The design also
uses labyrinthtype sealing to minimize particle migration from
the spindle, resulting in certification for Class 1 clean-room
operation. An integral rotary union is provided for a vacuum supply.
Brushless Direct Drive
To maximize positioning performance, the ASR series utilizes Aerotech's
brushless motor technology. These motors have all the advantages
of a brushless direct-drive motor — no brushes to wear,
and high acceleration and high speeds. With its low inherent inertia
and high torque output, the ASR is capable of extremely high speeds
and accelerations. In addition, the efficient electromagnetic
design provides high performance with lower operating temperatures
than comparable products.
Accurate Positioning
With a velocity ripple of <0.1%, a total radial error motion
=5 µm, and total axial error motion <2 µm, the
Aerotech spindle offers superior performance for high accuracy
applications. The high performance motor and rotary encoder are
directly coupled to a common shaft. The absence of gear trains
and mechanical couplings means no position errors caused by hysteresis,
windup, or backlash.
Flexible Configurations
Options include mechanical or vacuum chuck configurations. Aerotech
manufactures a wide range of servo amplifiers and advanced controllers
to provide a complete, integrated package.
|
