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Home >> Linear Stages Selection Guide >> Mechanical Bearings Linear-Motor-Driven

Aerotech manufactures a large selection of linear tables/slides/stages that utilize our own brushless linear direct-drive servomotors, as well as ball screw models driven with Aerotech brush or brushless rotary motors. Travels for our linear tables range from 25 mm to 1.5 meters. Aerotech’s tables are utilized in high-performance applications in industrial robots, fiberoptics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component laser machining, electronic manufacturing, and other industrial automation applications. We even offer our new NANO Technology series stages that provide nanometer resolution, accuracy, repeatability, and in-position stability in models with travels from 25 mm to 150 mm. In addition, Aerotech manufactures drives and motion control solutions that perfectly complement our linear tables.


Direct-Drive Mechanical-Bearing Linear Stages



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ANT95-L NanoTranslation, Cross-Roller Bearing Linear Stage ANT95-XY NanoTranslation, Cross-Roller Bearing Linear Stage ANT-130XY NanoTranslation, Two Axis, Cross-Roller Bearing Linear Stage

Aerotech’s NanoTranslation (ANT95-L, ANT95-L-H) crossed-roller stages combine speed, accuracy, resolution, repeatability, reliability, and compact size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series. Product improvements such as 5 g acceleration, 500 mm/s velocity, enhanced load capacity, and standardized, universal base mounting patterns allow the use of this flexible stage family in an even wider range of configurations than its predecessors.

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The Aerotech NanoTranslation (ANT) crossed-roller-bearing, linear motor, dual-axis stage is the newest release and continues the evolution of the ANT series of stages. The ANT95-XY and ANT95-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and two grades of accuracy.

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The ANT130-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT130-XY and ANT130-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 85 mm in travel options including 60 x 60 mm, 110 x 110 mm, and 160 x 160 mm.

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for complete product information.

Max Travel
25 or 50 mm
Accuracy
±250 nm
Load
7.0 kg
Max Travel
25 x 25 or 50 x 50 mm
Accuracy
±250 nm
Load
6.0 kg
Max Travel
60, 110, 160 mm
Accuracy
±250 nanometers
Speed
350 mm/s
Load
12 kg

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ANT130-L NanoTranslation, Cross-Roller Bearing Linear Stage ANT95-L-Z Linear Motor Vertical Stage ANT130-L-Z Linear Motor Vertical Stage

The ANT130-L series stages offer best-in-class performance in speed, accuracy, resolution, repeatability, reliability, travel range, and are offered in two accuracy grades. With its low profile and outstanding performance characteristics, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

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The ANT95 series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-L-Z and ANT95-L-Z-PLUS crossroller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability, and size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

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The ANT130 series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT130-L-Z and ANT130-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability, and size, and are offered in two accuracy grades. As an evolution of the popular ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

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Max Travel
35, 60, 110, 160 mm
Accuracy
±250 nm
Load
12.0 kg
Max Travel
50 mm
Accuracy
±300 nm
Load
5.0 kg
Max Travel
60 mm
Repeatability
±300 nm
Load
10 kg

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linear tables

ANT180-L Linear Motor Stage ALS130H Linear Motor Stage ALS130 Linear Motor Stage

The ANT180-L continues the expansion of Aerotech’s line of high precision crossed-roller stages. With its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance, it is the ultimate solution for high-accuracy alignment, measurement, scanning, and other demanding applications.

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The ALS130H, with its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications.

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The ALS130, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.

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Max Travel
360 mm
Accuracy
±150 nm
Load
30.0 kg
Max Travel
150 mm
Repeatability
75 nm
Load
12.0 kg
Max Travel
150 mm
Accuracy
±0.3µm
Load
12.0 kg

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ALS135 Linear Motor Stage ALS1000 Linear Stage PRO165LM Linear Stage

The ALS135 uses a center-driven, non-cogging linear motor and noncontact linear encoder for long life. A moving magnet track design eliminates the need for cable management.

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The ALS1000 is a compact, high- performance stage that is as accurate as it is versatile. It provides a small cross section, small payload capacity, cost-effective alternative for precision applications where a small footprint and environmental protection are required.

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The PRO165LM is a high-performance linear motor stage that is as accurate as it is versatile, providing a cost effective alternative for precision applications. A linear motion guide bearing system and high-performance brushless linear servomotor make the PRO165LM the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.

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Max Travel
200 mm
Accuracy

±0.3 µm

Load
12 kg
Max Travel
450 mm
Accuracy

±1.0 µm

Load
50 kg
Travel
100 mm - 1000 mm
Accuracy
±4 µm
Load
45 kg

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PRO225LM Linear Stage PRO280LM Linear Stage PRO560LM Linear Stage

The PRO225LM is the medium-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective, and versatile linear motor stages. The PRO225LM is a good alternative to the PRO165LM for applications that require higher stiffness, have larger payloads, or require greater than 1 m of travel. A linear motion guide bearing system and high-performance brushless linear servomotor make the PRO225LM the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.

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The PRO280LM is the full-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective, and versatile linear motor stages. The PRO280LM is a good alternative to the PRO225LM for applications that require higher thrust force, higher stiffness, or have larger payloads. A linear motion guide bearing system and high performance brushless linear servomotor make the PRO280LM the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.

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The PRO560LM is the full-sized, wide-body offering in Aerotech’s PRO-LM series of high performance, cost-effective, and versatile linear motor stages. The PRO560LM was designed to be used primarily as the lower axis of a PRO560LM/PRO280LM XY stack, but it may be used anywhere the wider support platform, increased roll stiffness, and extra motor thrust force may be of benefit. The PRO560LM is the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.

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Max Travel
1500 mm
Accuracy
±1.5 µm
Load
100 kg
Max Travel
1500 mm
Accuracy
±2.0 µm
Load
150 kg
Max Travel
1500 mm
Accuracy
±2.0 µm
Load
150 kg

linear stages linear stages linear tables
ALS2200 Linear Motor Stage ALS3600 Open Frame Linear Stage ALS5000 Linear Motor Stage

Designed for applications requiring exceptional smoothness of travel, the ALS2200 utilizes precision crossed-roller bearings. Since there are no recirculating elements, vibration throughout travel is minimized, resulting in outstanding velocity stability. Machined from a stress-relieved special aluminum-alloy extruded base, the ALS2200 has excellent stiffness and long-term stability.

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The demand for a high-accuracy, robust, open-frame stage is met with the ALS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection, and automated assembly.

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The ALS5000 was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers, and high power linear motor makes the ALS5000 the stage of choice in laser machining, ceramic scribing, or any other application requiring high accuracy in a production environment.

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Max Travel
150 mm
Accuracy
±0.75 µm
Load
30.0 kg
Max Travel
400 mm
Accuracy
±2.0 µm
Load
90.0 kg
Max Travel
1000 mm
Accuracy

±1.0 µm

Load
135 kg

linear stages linear tables linear tables
ALS5000WB Linear Motor Stage ALS20000 Linear Stage ALS25000 Linear Motor Stage

The ALS5000WB is a large base version of the popular ALS5000 series stage. The wider bearing spacing makes the ALS5000WB ideally suited for applications with large offset loads, and is commonly used as the lower axis in XY stage systems with large travel.

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The ALS20000 was designed to have exceptional velocity control, low vibration, high accuracy, and excellent throughput, making it the ideal solution for imaging and precision inspection applications.

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The ALS25000 was designed to offer a customer with a small load requirement the added benefits of a linear motor stage capable of operating in dirty environments.

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Max Travel
1000 mm
Accuracy

±1.0 µm

Load
135 kg
Max Travel
600 mm
Accuracy
±1.0 µm
Load
70.0 kg
Max Travel
600 mm
Accuracy

±1.0 µm

Load
70 kg
     
     
     
     


 

 
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Aerotech is a motion controller and motion control systems manufacturer.