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| ANT95-L
NanoTranslation, Cross-Roller Bearing Linear Stage |
ANT95-XY
NanoTranslation, Cross-Roller Bearing Linear Stage |
ANT-130XY NanoTranslation, Two Axis,
Cross-Roller Bearing Linear Stage |
Aerotech’s
NanoTranslation (ANT95-L, ANT95-L-H) crossed-roller stages combine
speed, accuracy, resolution, repeatability, reliability, and
compact size, and are offered in two accuracy grades. As an
evolution of the popular ANT stage family, these linear stages
exhibit enhanced motion performance over Aerotech’s
first generation ANT series. Product improvements such as
5 g acceleration, 500 mm/s velocity, enhanced load capacity,
and standardized, universal base mounting patterns allow the
use of this flexible stage family in an even wider range of
configurations than its predecessors.
Click here for
complete product information. |
The
Aerotech NanoTranslation (ANT) crossed-roller-bearing, linear
motor, dual-axis stage is the newest release and continues
the evolution of the ANT series of stages. The ANT95-XY and
ANT95-XY-H are three-piece designs that allow travel in two
dimensions (X and Y). The sleek design provides an extremely
low profile of only 60 mm. The stage comes with proprietary
direct-drive motor technology, noncontact linear encoders,
limits, integrated cable management system, and two grades
of accuracy.
Click here for
complete product information. |
The ANT130-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT130-XY and ANT130-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 85 mm in travel options including 60 x 60 mm, 110 x 110 mm, and 160 x 160 mm.
Click here for
complete product information. |
Max
Travel |
25
or 50 mm |
Accuracy |
±250
nm |
Load |
7.0
kg |
|
Max
Travel |
25
x 25 or 50 x 50 mm |
Accuracy |
±250
nm |
Load |
6.0
kg |
|
Max
Travel |
60, 110, 160 mm |
Accuracy |
±250 nanometers |
Speed |
350 mm/s |
Load |
12 kg |
|
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| ANT130-L
NanoTranslation, Cross-Roller Bearing Linear Stage |
ANT95-L-Z
Linear Motor Vertical Stage |
ANT130-L-Z
Linear Motor Vertical Stage |
The
ANT130-L series stages offer best-in-class performance in
speed, accuracy, resolution, repeatability, reliability, travel
range, and are offered in two accuracy grades. With its low
profile and outstanding performance characteristics, the ANT130-L
is the ultimate solution for high-accuracy alignment, inspection,
positioning, and measurement stations.
Click here for
complete product information. |
The ANT95 series stages are the world’s first
nanometer-level positioning systems with greater than 25
mm travel. The ANT95-L-Z and ANT95-L-Z-PLUS crossroller
stages are the best-in-class in combining speed,
accuracy, resolution, repeatability, reliability, and size, and
are offered in two accuracy grades. As an evolution of the
popular ANT stage family, these linear stages exhibit
enhanced motion performance over Aerotech’s first
generation ANT series.
Click here for complete product information. |
The ANT130 series stages are the world’s first
nanometer-level positioning systems with greater than 25
mm travel. The ANT130-L-Z and ANT130-L-Z-PLUS
crossed-roller stages are the best-in-class in combining speed,
accuracy, resolution, repeatability, reliability, and size, and
are offered in two accuracy grades. As an evolution of the
popular ANT stage family, these linear stages exhibit
enhanced motion performance over Aerotech’s first
generation ANT series.
Click here for complete product information. |
Max
Travel |
35,
60, 110, 160 mm |
Accuracy |
±250
nm |
Load |
12.0
kg |
|
Max
Travel |
50
mm |
Accuracy |
±300 nm |
Load |
5.0
kg |
|
Max
Travel |
60
mm |
Repeatability |
±300 nm |
Load |
10
kg |
|
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| ANT180-L
Linear Motor Stage |
ALS130H
Linear Motor Stage |
ALS130
Linear Motor Stage |
The ANT180-L continues the expansion of Aerotech’s line
of high precision crossed-roller stages. With its sub-nanometer
resolution, superior bi-directional repeatability, and
exceptional low-velocity performance, it is the ultimate
solution for high-accuracy alignment, measurement,
scanning, and other demanding applications.
Click here for complete product information. |
The
ALS130H, with its sub-nanometer resolution, superior bi-directional
repeatability, and exceptional low-velocity performance, is
the unparalleled solution for high performance test, measurement,
inspection, and other demanding applications.
Click here for complete product information. |
The
ALS130, with its low profile and outstanding performance characteristics,
is the ultimate solution for high-accuracy alignment and inspection
stations.
Click here for complete product information. |
Max
Travel |
360
mm |
Accuracy |
±150
nm |
Load |
30.0
kg |
|
Max
Travel |
150
mm |
Repeatability |
75
nm |
Load |
12.0
kg |
|
Max
Travel |
150
mm |
Accuracy |
±0.3µm |
Load |
12.0
kg |
|
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| ALS135
Linear Motor Stage |
ALS1000
Linear Stage |
PRO165LM Linear Stage |
The
ALS135 uses a center-driven, non-cogging linear motor and
noncontact linear encoder for long life. A moving magnet track
design eliminates the need for cable management.
Click here for complete product information. |
The
ALS1000 is a compact, high- performance stage that is as accurate
as it is versatile. It provides a small cross section, small
payload capacity, cost-effective alternative for precision
applications where a small footprint and environmental protection
are required.
Click here for complete product information. |
The PRO165LM is a high-performance linear motor stage that is as accurate as it is versatile, providing a cost effective alternative for precision applications. A linear motion guide bearing system and high-performance brushless linear servomotor make the PRO165LM the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.
Click here for complete product information. |
Max
Travel |
200
mm |
Accuracy |
|
Load |
12
kg |
|
Max
Travel |
450
mm |
Accuracy |
|
Load |
50
kg |
|
Travel |
100 mm
- 1000 mm |
Accuracy |
±4
µm |
Load |
45
kg |
|
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| PRO225LM Linear Stage |
PRO280LM Linear Stage |
PRO560LM Linear Stage |
The PRO225LM is the medium-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective, and versatile linear motor stages. The PRO225LM is a good alternative to the PRO165LM for applications that require higher stiffness, have larger payloads, or require greater than 1 m of travel. A linear motion guide bearing system and high-performance brushless linear servomotor make the PRO225LM the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.
Click here for complete product information. |
The PRO280LM is the full-sized offering in Aerotech’s PRO-LM series of high performance, cost-effective, and versatile linear motor stages. The PRO280LM is a good alternative to the PRO225LM for applications that require higher thrust force, higher stiffness, or have larger payloads. A linear motion guide bearing system and high performance brushless linear servomotor make the PRO280LM the stage of choice in industrial applications such as laser machining, medical component manufacturing, and other applications requiring high accuracy in a production environment.
Click here for complete product information. |
The PRO560LM is the full-sized, wide-body offering in Aerotech’s
PRO-LM series of high performance, cost-effective, and
versatile linear motor stages. The PRO560LM was
designed to be used primarily as the lower axis of a
PRO560LM/PRO280LM XY stack, but it may be used
anywhere the wider support platform, increased roll
stiffness, and extra motor thrust force may be of benefit.
The PRO560LM is the stage of choice in industrial
applications such as laser machining, medical component
manufacturing, and other applications requiring high
accuracy in a production environment.
Click here for complete product information. |
Max
Travel |
1500
mm |
Accuracy |
±1.5
µm |
Load |
100
kg |
|
Max
Travel |
1500
mm |
Accuracy |
±2.0
µm |
Load |
150
kg |
|
Max
Travel |
1500
mm |
Accuracy |
±2.0
µm |
Load |
150
kg |
|
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| ALS2200
Linear Motor Stage |
ALS3600
Open Frame Linear Stage |
ALS5000
Linear Motor Stage |
Designed for applications requiring exceptional smoothness
of travel, the ALS2200 utilizes precision crossed-roller
bearings. Since there are no recirculating elements,
vibration throughout travel is minimized, resulting in
outstanding velocity stability. Machined from a stress-relieved
special aluminum-alloy extruded base, the
ALS2200 has excellent stiffness and long-term stability.
Click here for complete product information. |
The
demand for a high-accuracy, robust, open-frame stage is met
with the ALS3600. This dual-axis, large aperture, open-frame
stage addresses the unique needs of scanning microscopy, wafer
and printed circuit board inspection, and automated assembly.
Click here for complete product information. |
The
ALS5000 was designed to meet the needs of the most demanding
applications. A rigid base, fully sealed metal waycovers,
and high power linear motor makes the ALS5000 the stage of
choice in laser machining, ceramic scribing, or any other
application requiring high accuracy in a production environment.
Click here for complete product information. |
Max
Travel |
150
mm |
Accuracy |
±0.75
µm |
Load |
30.0
kg |
|
Max
Travel |
400
mm |
Accuracy |
±2.0
µm |
Load |
90.0
kg |
|
Max
Travel |
1000
mm |
Accuracy |
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Load |
135
kg |
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| ALS5000WB
Linear Motor Stage |
ALS20000
Linear Stage |
ALS25000
Linear Motor Stage |
The
ALS5000WB is a large base version of the popular ALS5000 series
stage. The wider bearing spacing makes the ALS5000WB ideally
suited for applications with large offset loads, and is commonly
used as the lower axis in XY stage systems with large travel.
Click here for complete product information. |
The
ALS20000 was designed to have exceptional velocity control,
low vibration, high accuracy, and excellent throughput, making
it the ideal solution for imaging and precision inspection
applications.
Click here for complete product information. |
The
ALS25000 was designed to offer a customer with a small load
requirement the added benefits of a linear motor stage capable
of operating in dirty environments.
Click here for complete product information. |
Max
Travel |
1000
mm |
Accuracy |
|
Load |
135
kg |
|
Max
Travel |
600
mm |
Accuracy |
±1.0
µm |
Load |
70.0
kg |
|
Max
Travel |
600
mm |
Accuracy |
|
Load |
70
kg |
|