Aerotech’s ABRS series rotary air-bearing stages provide
superior angular positioning, velocity stability, and error motion
performance in an exceptionally low-profile package. The ABRS
is designed to meet the exacting requirements of wafer inspection,
high precision metrology, x-ray diffraction systems, optical inspection
and fabrication, and MEMS/nanotechnology device fabrication.
Compact Package
The design of the ABRS series direct-drive rotary stage has been
optimized to minimize stage height. The low profile of the stage
reduces the effective working height of the system, minimizing
“stack-up” related errors. In addition to the low
overall height, the ABRS series provides a clear aperture that
can be used for product feed-through, laser beam delivery, cable
clearance, or application-specific requirements.
Superior Mechanical Design
The ABRS design features large air-bearing surfaces for high stiffness
and load capacity, producing not only excellent axial and radial
error motions, but outstanding tilt error motion, as well. The
resultant face error motion is significantly better than other
rotary air-bearing tables and spindles, greatly benefiting applications
requiring exceptional planar performance.
Brushless Direct-Drive
To maximize positioning performance, the ABRS series utilizes
Aerotech’s S-series slotless, brushless motor. The motor
uses an advanced magnetic circuit design to produce high torque
output with minimal heat generation. The slotless design is inherently
zero-cogging and torque ripple-free. This makes the ABRS stages
ideal for applications requiring smooth scan velocities at low
or high speeds.
Accurate Positioning
An optical encoder is standard with the ABRS. When coupled with
Aerotech’s feedback multipliers and controls, resolutions
of <0.03 arc second are achievable.
Custom Designs
Custom versions of the ABRS are available for rate table and inertial
guidance test-stand applications.
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