| Width |
150
mm |
200
mm |
250
mm |
300
mm |
| Tabletop Diameter |
128.1
mm |
178.1
mm |
228.1
mm |
278.1
mm |
| Height |
80
mm |
90
mm |
100
mm |
110
mm |
| Aperture |
8
mm |
20
mm |
35
mm |
75
mm |
| Total Travel |
360°
Continuous |
| Motor |
S-50-39-A |
S-76-35-A |
S-130-39-A |
S-180-44-A |
| Stall Torque, Continuous |
0.20
N-m |
0.53
N-m |
2.36
N-m |
5.99
N-m |
| Peak Torque |
0.82
N-m |
2.12
N-m |
9.42
N-m |
23.98
N-m |
| BEMF, Line-Line, Max |
10.3
V pk/Krpm |
32.1
V pk /Krpm |
75.1
V pk /Krpm |
268.7
V pk /Krpm |
| Continuous Current, Stall |
2.4
A pk |
2.0
A pk |
3.8
A pk |
2.7
A pk |
| 1.7 A pk |
1.4
A pk |
2.7
A pk |
1.9
A pk |
| Torque Constant |
0.09
N-m/A pk |
0.26
N-m/A pk |
0.62
N-m/A pk |
2.22
N-m/A pk |
| 0.12 N-m/A rms |
0.37
N-m/A rms |
0.88
N-m/A rms |
3.14
N-m/A rms |
| Bus Voltage |
Up
to 340 VDC |
| Resolution(1) |
0.873
μrad (0.18 arc sec) |
0.383
μrad (0.079 arc sec) |
0.267
μrad (0.055 arc sec) |
0.174
μrad (0.036 arc sec) |
| Fundamental Encoder Resolution |
3600
lines/rev |
8192
lines/rev |
11,840
lines/rev |
18,000
lines/rev |
| Max Speed |
300
rpm |
300
rpm |
500
rpm |
500
rpm |
| Accuracy |
Calibrated |
±2
arc sec |
| Repeatability |
<1
arc sec |
| Max Load(3) |
Axial |
8
kg |
31
kg |
66
kg |
97
kg |
| Radial |
4
kg |
15
kg |
36
kg |
51
kg |
| Tilt |
3
N-m |
10
N-m |
28
N-m |
45
N-m |
| Axial Error Motion (Synchronous) |
<100
nm |
| Radial Error Motion (Synchronous) |
<250
nm |
| Tilt Error Motion (Synchronous) |
<4.4
μrad (<0.9 arc sec) |
<3.4
μrad (<0.7 arc-sec) |
<2.4
μrad (<0.5 arc sec) |
<2.4
μrad (<0.5 arc sec) |
| Axial Error Motion (Asynchronous) |
<20
nm |
| Radial Error Motion (Asynchronous) |
<20
nm |
| Tilt Error Motion (Asynchronous) |
<0.4
μrad (<0.08 arc sec) |
<0.3
μrad (<0.06 arc-sec) |
<0.2
μrad (<0.04 arc sec) |
<0.2
μrad (<0.04 arc sec) |
| Operating Pressure(5) |
80
psig (5.5 bar) + 0 psig (0.0 bar) / -10 psig (0.7 bar) |
| Air Consumption(6) |
<2
scfm |
| Inertia |
Unloaded |
3850
kg-mm2 |
13,800
kg-mm2 |
39,100
kg-mm2 |
102,000
kg-mm2 |
| Total Mass |
4.8
kg |
9.1
kg |
15.6
kg |
24.5
kg |
| Material |
Aluminum |
| Finish |
Hardcoat
(62 Rockwell Hardness) |
Notes:
1. Maximum resolution presumes A3200
controller using MXH500 multiplication, and accounts for controller quadrature.
2. Maximum speed based on stage capability.
Maximum application velocity may be limited by system data rate and system
resolution.
3. Maximum loads are mutually exclusive.
4. All error motion specifications measured at
60 rpm.
5. To protect air bearing against
under-pressure, an in-line pressure switch tied to the motion controller is
recommended.
6. Air supply must be clean, dry to 0° F dew
point, and filtered to 0.25 μm or better. Recommend nitrogen at 99.9%
purity.
|
United
States [Change]
