Aerotech’s ABRT series rotary air-bearing stages provide
superior angular positioning, velocity stability, and error motion
performance along with impressive payload capacity and outstanding
radial and axial stiffness. The ABRT is designed to meet the exacting
requirements of DVD mastering, wafer inspection, high precision
metrology applications, X-ray diffraction systems, optical inspection
and fabrication, and MEMS/nanotechnology device fabrication.
Superior Mechanical Design
The ABRT design features large air-bearing surfaces and innovative
preloading for high stiffness and load capacity, producing not
only excellent axial and radial error motions, but outstanding
tilt error motion, as well. The resultant performance is significantly
better than other rotary air-bearing tables and spindles, greatly
benefiting applications requiring exceptional planar performance.
Furthermore, this stage family provides a clear aperture that
can be used for product feed-through, laser beam delivery, cable
clearance, or application-specific requirements.
Brushless Direct-Drive
To maximize positioning performance, the ABRT series utilizes
optimized versions of Aerotech’s S-series slotless, brushless
motor. The motor uses an advanced magnetic circuit design to produce
high torque output with minimal heat generation. The slotless
design is inherently zero-cogging and torque-ripple-free. This
makes ABRT stages ideal for applications requiring smooth scan
velocities at low or high speeds.
Accurate Positioning
An optical encoder is standard with the ABRT. When coupled with
Aerotech’s feedback multipliers and controls, resolutions
of <0.03 arc second are achievable.
Custom Designs
Custom versions of the ABRT are available to satisfy rate table
and high precision inertial guidance test-stand applications.
Other features, such as slip rings and rotary unions, are available.
Flexible Configurations
Aerotech manufactures a wide range of servo amplifiers and advanced
controllers to provide a complete, integrated package.
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