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Width |
146 mm |
196 mm |
260 mm |
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Tabletop Diameter |
100 mm |
145 mm |
200 mm |
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Height |
135 mm |
165 mm |
185 mm |
|
Aperture |
20 mm |
30 mm |
50 mm |
|
Total Travel |
360° Continuous |
|
Motor |
Direct-Drive Brushless Servomotor |
|
Stall Torque, Continuous |
0.36 N-m |
3.7 N-m |
6.7 N-m |
|
Peak Torque |
1.4 N-m |
14.6 N-m |
26.6 N-m |
|
BEMF, Line-Line, Max |
10.9 Vpk/krpm |
163.6 Vpk/krpm |
129.8 Vpk/krpm |
|
Continuous Current, Stall |
3.8 Apk |
2.7 Apk |
6.2 Apk |
|
2.7 Arms |
1.9 Arms |
4.4 Arms |
|
Torque Constant |
0.09 N-m/Apk |
1.35 N-m/Apk |
1.07 N-m/Apk |
|
0.13 N-m/Arms |
1.91 N-m/Arms |
1.52 N-m/Arms |
| Bus
Voltage |
Up
to 320 VDC |
|
Resolution(1) |
0.267 µrad (0.055 arc sec) |
0.174 µrad (0.036 arc sec) |
0.133 µrad (0.027 arc sec) |
|
Fundamental Encoder Resolution |
11,840 lines/rev |
18,000 lines/rev |
23,600 lines/rev |
|
Max Speed |
1200 rpm |
800 rpm |
600 rpm |
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Accuracy |
Calibrated |
±2 arc sec |
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Repeatability |
<1 arc sec |
|
Max Load(3) |
Axial |
20 kg |
41 kg |
69 kg |
|
Radial |
3 kg |
6 kg |
10 kg |
|
Tilt |
3.5 N-m |
8 N-m |
18 N-m |
|
Axial Error Motion (Synchronous) |
<100 nm |
|
Radial Error Motion (Synchronous) |
<150 nm |
|
Tilt Error Motion (Synchronous) |
<2.4 µrad (<0.5 arc sec) |
|
Axial Error Motion (Asynchronous) |
<20 nm |
|
Radial Error Motion (Asynchronous) |
<20 nm |
|
Tilt
Error Motion (Asynchronous) |
<0.2 µrad (<0.04 arc sec) |
|
Operating Pressure(5) |
80 psig (5.5 bar) ± 5 psig (0.3 bar) |
|
Air Consumption(6) |
<2 scfm |
|
Inertia |
Unloaded |
2300 kg-mm2 |
13,500 kg-mm2 |
46,400 kg-mm2 |
|
Total Mass |
6.7 kg |
14.7 kg |
27.1 kg |
|
Material |
Aluminum |
|
Finish |
Hardcoat (62 Rockwell Hardness) |
Notes:
1. Maximum resolution presumes A3200 controller using MXH500 multiplication,
and accounts for controller quadrature.
2. Maximum speed based on stage capability. Maximum application
velocity may be limited by system data rate and system resolution.
3. Maximum loads are mutually exclusive.
4. All error motion specifications measured at 60 rpm.
5. To protect air bearing against under-pressure, an in-line pressure
switch tied to the motion controller is recommended.
6. Air supply must be clean, dry to 0° F dew point, and filtered
to 0.25 µm or better. Recommend nitrogen at 99.9% purity.
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United
States [Change]
