| Table Diameter |
175 mm (7 in) |
240 mm (9.5 in) |
| Total Travel |
±360° Continuous |
| Drive System |
Direct-Drive Brushless Servomotor |
| Feedback |
Directly-Coupled Rotary Encoder (RE) |
| Resolution |
0.17-63.1 µrad (0.036-13.0 arc sec; 0.00001 - 0.0036°) |
| Maximum Rotary
Speed(1) |
200 rpm |
|
Maximum Load |
Axial |
30 kg (66 lb) |
150
kg (330 lb) |
|
Radial |
25 kg |
90
kg |
|
Torque Output |
Peak |
11.7 N-m
(8.6 lb-ft) |
21.2 N-m
(15.6
lb-ft) |
30.0 N-m
(22.1 lb-ft) |
80.0 N-m
(59.0 lb-ft) |
|
Continuous |
2.8 N-m
(2.1 lb-ft) |
5.2 N-m
(3.8 lb-ft) |
7.4 N-m
(5.5 lb-ft) |
19.9 N-m
(14.7 lb-ft) |
| Inertia (unloaded) |
0.0083 kg-m2
0.0061 lb-ft-s2 |
0.0099 kg-m2
0.0073 lb-ft-s2 |
0.039 kg-m2
0.029 lb-ft-s2 |
0.056 kg-m2
0.041 lb-ft-s2 |
| Acceleration
(Unloaded) |
1050 rad/s2 |
1575 rad/s2 |
577 rad/s2 |
1069 rad/s2 |
| Tilt Error
Motion |
24.3 µrad (5 arc sec; 0.0014°) |
9.7 µrad (2 arc sec; 0.00056°) |
|
Axis Error Motion |
Axial |
1.0 µm (40 µin) |
0.5 µm (20 µin) |
|
Radial(2) |
2.0 µm (80 µin) |
1.0 µm (40 µin) |
| Nominal Stage
Weight |
11.0 kg
(24.3
lb) |
14.0 kg
(30.9
lb) |
24.0 kg
(52.9 lb) |
35.0 kg
(77.2 lb) |
|
Finish |
Stage |
Black Anodize |
|
Table |
Hard Coat |
United
States [Change]
