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ALAR Series
Description
   

ALAR Series

ALAR-100-SP

ALAR-100-LP

ALAR-150-SP

ALAR-150-LP
Aperture 100 mm (3.94 in) 100 mm (3.94 in) 150 mm (5.91 in) 150 mm (5.91 in)
Motor S-180-44-A Brushless Slotless S-240-43-A Brushless Slotless
Continuous Current Apk 2.7 5.76 6.2 5.41
Arms 1.9 4.1 4.4 4.1
Peak Current, Stall Apk 10.8 33.5 24.8 31.4
Arms 7.6 23.7 17.5 22.2
Bus Voltage Up to 340 VDC
Length 250 mm (9.84 in) 250 mm (9.84 in) 300 mm (11.81 in) 300 mm (11.81 in)
Width 250 mm (9.84 in) 250 mm (9.84 in) 300 mm (11.81 in) 300 mm (11.81 in)
Height 100 mm (3.94 in) 65 mm (2.56 in) 100 mm (3.94 in) 65 mm (2.56 in)
Unlimited Travel Yes
Maximum Limited Travel ±170° ±170° ±170° ±170°
Maximum Velocity @ 160 V Bus(1) 300 rpm 50 rpm 250 rpm 45 rpm
Maximum Acceleration 1364 rad/s2 1009 rad/s2 1330 rad/s2 829 rad/s2
Resolution(2) 0.1 µrad (0.02 arc-sec) 0.1 µrad (0.02 arc-sec) 0.08 µrad (0.016 arc-sec) 0.09 µrad (0.018 arc-sec)
Maximum Torque 23.9 N-m (211.5 lb-in) 11.9 N-m (105.3 lb-in) 42.9 N-m (379.7 lb-in) 15.4 N-m (136.3 lb-in)
Continuous Torque 6.0 N-m (53.1 lb-in) 2.0 N-m (17.7 lb-in) 10.7 N-m (94.7 lb-in) 2.6 N-m (23.0 lb-in)
Weight 160 N (36 lb) 81 N (18.1 lb) 182 N (41 lb) 96 N (21.6 lb)
Weight with Limits 167 N (37.5 lb) 87 N (19.6 lb) 192 N (43.2 lb) 106 N (23.8 lb)
Shaft Inertia 0.022 kg-m2 0.022 kg-m2 0.040 kg-m2 0.031 kg-m2
Shaft Inertia with Limits 0.026 kg-m2 0.026 kg-m2 0.051 kg-m2 0.042 kg-m2
Axial Load 1550 N (348 lb) 1175 N (264 lb) 1950 N (438 lb) 1325 N (298 lb)
Radial Load 1350 N (303 lb) 950 N (214 lb) 1925 N (433 lb) 1275 N (287 lb)
Moment Load 250 N-m 150(3) N-m 450 N-m 225(3) N-m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(4) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 9.7 µrad (2.0 arc sec)

Note:
1. Square-wave digital encoder options will limit maximum speed below the listed value. Contact factory for specific stage and encoder speed combination. 2. Resolution assumes -AS encoder with 2000X controller multiplication.
3. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load.
4. Accuracy assumes calibration.

 

ALAR Series

ALAR-200-SP

ALAR-200-LP

ALAR-250-SP-2

ALAR-250-SP-3

ALAR-250-LP
Aperture 200 mm (7.87 in) 200 mm (7.87 in) 250 mm (9.84 in) 250 mm (9.84 in) 250 mm (9.84 in)
Motor Brushless Slotless
Continuous Current Apk 5.3 5.3 5.3 7.95 5.3
Arms 3.75 3.75 3.75 5.62 3.75
Peak Current, Stall Apk 34.8 34.8 34.8 52.2 34.8
Arms 24.6 24.6 24.6 36.9 24.6
Bus Voltage Up to 340 VDC
Length 400 mm (15.75 in) 400 mm (15.75 in) 450 mm (17.72 in) 450 mm (17.72 in) 450 mm (17.72 in)
Width 400 mm (15.75 in) 400 mm (15.75 in) 450 mm (17.72 in) 450 mm (17.72 in) 450 mm (17.72 in)
Height 150 mm (5.91 in) 100 mm (3.94 in) 150 mm (5.91 in) 150 mm (5.91 in) 100 mm (3.94 in)
Unlimited Travel Yes
Maximum Limited Travel ±170° ±170° ±170° ±170° ±170°
Maximum Velocity(1) 90 rpm 90 rpm 140 rpm 140 rpm 90 rpm
Maximum Acceleration 361 rad/s2 570 rad/s2 287 rad/s2 287 rad/s2 407 rad/s2
Resolution(2) 0.06 µrad
(0.012 arc-sec)		 0.07 µrad
(0.014 arc-sec)		 0.05 µrad
(0.01 arc-sec)		 0.05 µrad
(0.01 arc-sec)		 0.05 µrad
(0.01 arc-sec)
Maximum Torque 86 N-m (761.2 lb-in) 86 N-m (761.2 lb-in) 92 N-m (814.3 lb-in) 138 N-m (1221.4 lb-in) 92 N-m (814.3 lb-in)
Continuous Torque 12.9 N-m (114.2 lb-in) 12.9 N-m (114.2 lb-in) 14.1 N-m (124.8 lb-in) 21.1 N-m (186.8 lb-in) 14.1 N-m (124.8 lb-in)
Weight 396 N (89 lb) 277 N (62.3 lb) 503 N (113 lb) 503 N (113 lb) 343 N (77.1 lb)
Weight with Limits 423 N (95 lb) 295 N (66.4 lb) 534 N (120 lb) 534 N (120 lb) 367 N (82.6 lb)
Shaft Inertia 0.320 kg-m2 0.190 kg-m2 0.500 kg-m2 0.500 kg-m2 0.310 kg-m2
Shaft Inertia with Limits 0.359 kg-m2 0.229 kg-m2 0.573 kg-m2 0.573 kg-m2 0.383 kg-m2
Axial Load 4675 N (1051 lb) 4350 N (978 lb) 4950 N (1113 lb) 4950 N (1113 lb) 4950 N (1113 lb)
Radial Load 4775 N (1073 lb) 4125 N (927 lb) 5200 N (1169 lb) 5200 N (1169 lb) 5050 N (1135 lb)
Moment Load 1600 N-m 1075(3) N-m 1825 N-m 1825 N-m 1475(3) N-m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(4) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 9.7 µrad (2.0 arc sec)

Note:
1. Square-wave digital encoder options will limit maximum speed below the listed value. Contact factory for specific stage and encoder speed combination. 2. Resolution assumes -AS encoder with 2000X controller multiplication.
3. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load.
4. Accuracy assumes calibration.

 

ALAR Series

ALAR-325-SP-2

ALAR-325-SP-3

ALAR-325-LP
Aperture 325 mm (12.80 in) 325 mm (12.80 in) 325 mm (12.80 in)
Motor Brushless Slotless
Continuous Current Apk 5.1 7.65 5.1
Arms 3.63 5.41 3.63
Peak Current, Stall Apk 31.2 46.8 31.2
Arms 22.1 33.1 22.1
Bus Voltage Up to 340 VDC
Length 525 mm (20.67 in) 525 mm (20.67 in) 525 mm (20.67 in)
Width 525 mm (20.67 in) 525 mm (20.67 in) 525 mm (20.67 in)
Height 150 mm (5.91 in) 150 mm (5.91 in) 100 mm (3.94 in)
Unlimited Travel Yes
Maximum Limited Travel ±170° ±170° ±170°
Maximum Velocity(1) 150 rpm 150 rpm 120 rpm
Maximum Acceleration 185 rad/s2 185 rad/s2 339 rad/s2
Resolution(2) 0.04 µrad (0.009 arc-sec) 0.04 µrad (0.009 arc-sec) 0.04 µrad (0.009 arc-sec)
Maximum Torque 143 N-m (1265.7 lb-in) 214.9 N-m (1902.0 lb-in) 143 N-m (1265.7 lb-in)
Continuous Torque 23.4 N-m (207.1 lb-in) 35.1 N-m (310.7 lb-in) 23.4 N-m (207.1 lb-in)
Weight 600 N (135 lb) 600 N (135 lb) 436 N (98 lb)
Weight with Limits 636 N (143 lb) 636 N (143 lb) 489 N (110 lb)
Shaft Inertia
1.01 kg-m2
1.01 kg-m2
0.55 kg-m2
Shaft Inertia with Limits
1.2 kg-m2
1.2 kg-m2
0.675 kg-m2
Axial Load 5825 N (1310 lb) 5825 N (1310 lb) 5825 N (1310 lb)
Radial Load 6650 N (1495 lb) 6650 N (1495 lb) 6450 N (1450 lb)
Moment Load 2650 N-m 2650 N-m 2200(3) N-m
Repeatability ±2.4 µrad (±0.5 arc sec)
Accuracy(4) ±9.7 µrad (±2 arc sec)
Tilt-Error Motion 9.7 µrad (2.0 arc sec)

Note:
1. Square-wave digital encoder options will limit maximum speed below the listed value. Contact factory for specific stage and encoder speed combination. 2. Resolution assumes -AS encoder with 2000X controller multiplication.
3. The ALAR-LP base must be fully supported by a rigid mounting plate to achieve this moment load.
4. Accuracy assumes calibration.



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Accuracy X
For a specific point of interest in three-dimensional space, accuracy is the difference between the actual position in space and the position as measured by a measurement device. Stage accuracy is influenced by the feedback mechanism (linear encoder, rotary encoder, laser interferometer), drive mechanism (ball screw, lead screw, linear motor), and trueness of bearing ways. The measurement reference for Aerotech linear products is a laser interferometer.

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Straightness X
Straightness is a deviation from the true line of travel perpendicular to the direction of travel in the horizontal plane. For the stage assembly listed above, a straightness deviation in the travel of the X-axis stage will cause a positioning error in the Y direction. A straightness deviation in the travel of the Y-axis stage will cause a positioning error in the X direction.
Flatness X
Flatness is a deviation from the true line of travel perpendicular to the direction of travel in the vertical plane. For the stage assembly shown, a flatness deviation in the travel of the X-axis or Y-axis stage will cause a positioning error in the Z direction.
Roll X
Roll is a rotation around an axis in the horizontal plane parallel to the direction of travel. If the position of interest being measured is not located at the center of rotation, then the roll rotation will cause an Abbe error in two dimensions. For the X-axis, a roll rotation will cause an Abbe error in both the Y and Z direction.

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Pitch X
Pitch is a rotation around an axis in the horizontal plane perpendicular to the direction of travel. If the position of interest being measured is not located at the center of rotation, then the pitch rotation will cause an Abbe error in two dimensions.

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Yaw X
Yaw is a rotation around an axis in the vertical plane perpendicular to the direction of travel. If the position of interest being measured is not located at the center of rotation, then the yaw rotation will cause an Abbe error in two dimensions.

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Repeatability X
Repeatability is defined as the range of positions attained when the system is repeatedly commanded to one location under identical conditions. Uni-directional repeatability is measured by approaching the point from one direction, and ignores the effects of backlash or hysteresis within the system. Bi-directional repeatability measures the ability to return to the point from both directions. Many vendors specify repeatability as ± (resolution). This is the repeatability of any digital servo system as measured at the encoder. All of Aerotech's specifications, which include the effects of Abbe error, friction, etc. are based on actual operating conditions and usage - not on theoretical, unachievable values.
Resolution X
The smallest possible movement of a system. Also known as step size, resolution is determined by the feedback device and capabilities of the motion system. Theoretical resolution may exceed practical resolution.

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Axial Error Motion (Synchronous) X
Component of total error motion that occurs at integer multiples of rotation frequency coaxial with stage axis of rotation.
Radial Error Motion (Synchronous) X
Component of total error motion that occurs at integer multiples of rotation frequency perpendicular to the stage axis of rotation at a given axial location.
Tilt Error Motion (Synchronous) X
Component of total error motion that occurs at integer multiples of rotation frequency in an angular direction relative to the stage axis rotation. In previous specification tables published by Aerotech, the term wobble was used and is synonymous; however, wobble is no longer preferred.
Axial Error Motion (Asynchronous) X
Component of total error motion that occurs at noninteger multiples of rotation frequency coaxial with stage axis of rotation.
Radial Error Motion (Asynchronous) X
Component of total error motion that occurs at noninteger multiples of rotation frequency perpendicular to the stage axis of rotation at a given axial location.
Tilt Error Motion (Asynchronous) X
Component of total error motion that occurs at noninteger multiples of rotation frequency in an angular direction relative to the stage axis rotation.
Vacuum X
Aerotech’s vast application experience, unmatched product scope, and extensive engineering capabilities make us the partner of choice for vacuum-compatible motion systems. Since its inception, Aerotech has designed and manufactured the highest-performance motion control and positioning systems available, and our vacuum-compatible platforms are no exception.

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Cleanroom X
Aerotech has a long history of providing components and systems to the semiconductor and medical device manufacturing industries. This experience has provided extensive knowledge of how to prepare stages for cleanroom use.

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Maximum Load X
All maximum load values in the stage specification tables are based on the stage operating in a Normal Loading Condition. A Normal Loading condition results when the load is attached to the stage with the center of gravity positioned directly above the bearings.

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Orthogonality X
The condition of a surface or axis which is perpendicular (offset 90 degrees) to a second surface or axis. Orthogonality specification refers to the error from 90 degrees from which two surfaces of axes are aligned.
Accuracy X
Accuracy is defined as the difference between the commanded position and the actual position of a rotary stage. The accuracy can be influenced by the feedback device, drive mechanism (motor type), axis of rotation error motions, thermal effects (such as environmental changes), and the accuracy of mounting surfaces. Aerotech measures the accuracy of rotary tables using laser measurement techniques with ultra-precise index tables as the measurement reference. Unless specifically noted, Aerotech specifies accuracy as a peak-to-valley deviation from the nominal position.