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| Total Travel |
100 mm |
150 mm |
200 mm |
300 mm |
450 mm |
| Drive System |
Linear Brushless Servomotor (BLMC-142-A) |
| Bus Voltage |
Up
to 80 VDC |
| Continuous
Current |
Apk |
Up
to 4.20 A |
| Arms |
Up
to 2.97 A |
| Feedback |
Noncontact Linear Encoder |
| Resolution |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
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Maximum Travel Speed(1) |
750 mm/s (30 in/s) |
| Maximum Linear
Acceleration |
2 g (20 m/s2) (787 in/s2)(No Load) |
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Maximum Load(2) |
Horizontal |
50.0 kg (110 lb) |
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Side |
25.0 kg (55 lb) |
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Accuracy |
Standard |
±4.0 µm (±160 µin) |
±6.0 µm (±240 µin) |
±8.0 µm (±320 µin) |
±12.0 µm (±480 µin) |
±18.0 µm (±720 µin) |
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HALAR(3) |
±1.0 µm (±40 µin) |
| Repeatability |
±1.0 µm (±40 µin) |
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Straightness and Flatness |
Differential |
3.0 µm/25 mm (120 µin) |
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Max Deviation |
±2.4 µm (±96 µin) |
±3.6 µm (±144 µin) |
±4.8 µm (±192 µin) |
±7.2 µm (±288 µin) |
±10.8 µm (±432 µin) |
| Pitch and
Yaw |
6 arc sec |
9 arc sec |
12 arc sec |
16 arc sec |
20 arc sec |
| Nominal Stage
Weight |
8.4 kg (18.4 lb) |
10.0 kg (22.0 lb) |
11.0 kg (24.2 lb) |
13.1 kg (28.8 lb) |
16.0 kg (35.2 lb) |
| Construction |
Aluminum Body/ Black Anodize Finish/Hardcoat |
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Notes:
1. Maximum speed based on stage capability. Maximum application
velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability. Maximum application
load may be limited by acceleration requirements.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.

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