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| Total
Travel |
25
mm (1 in) |
50
mm (2 in) |
100
mm (4 in) |
150
mm (6 in) |
| Drive
System |
Linear
Brushless Servomotor (BLMUC-95-A) |
| Bus
Voltage |
Up
to 80 VDC |
| Continuous
Current |
A
pk |
2.94
|
| A
rms |
2.08
|
| Feedback
|
Noncontact
Linear Encoder |
| Resolution
|
0.5
nm -1.0 μm (0.02 μin -40 μin) |
| Maximum
Travel Speed(1) |
300
mm/s (12 in/s) |
| Maximum
Linear Acceleration |
1g
(10 m/s2) (384 in/s2) (No Load) |
| Maximum Load(2) |
Horizontal
|
12.0
kg (26.5 lb) |
| Side
|
10.0
kg (22.0 lb) |
| Accuracy
|
HALAR(3)
|
±0.3
μm (±12 μin) |
| Standard
|
±1.0
μm (±40 μin) |
±1.0
μm (±40 μin) |
±2.0
μm (±80 μin) |
±3.0
μm (±120 μin) |
| Repeatability
|
Mean
|
75
nm |
| Peak
to Peak |
±100
nm |
| Straightness
and Flatness |
Maximum
Deviation |
±1.0
μm (±40 μin) |
±1.0
μm (±40 μin) |
±1.5
μm (±60 μin) |
±2.0
μm (±80 μin) |
| Pitch
|
5
arc sec |
6
arc sec |
8
arc sec |
10
arc sec |
| Roll
|
5
arc sec |
6
arc sec |
8
arc sec |
10
arc sec |
| Yaw
|
3
arc sec |
3
arc sec |
4
arc sec |
5
arc sec |
| Nominal
Stage Weight |
3.0
kg (6.5 lb) |
3.0
kg (6.5 lb) |
3.8
kg (8.4 lb) |
4.6
kg (10.1 lb) |
| Moving
Mass |
0.9
kg (2.0 lb) |
1.1
kg (2.4 lb) |
1.3
kg (2.9 lb) |
1.6
kg (3.5 lb) |
| Construction
|
Aluminum
Body/Black Anodize Finish |
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|
Notes:
1. Maximum speed based on stage capability. Maximum application
velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability. Maximum application
load may be limited by acceleration requirements.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.



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