The ALS130H, with its sub-nanometer resolution, superior bi-directional
repeatability, and exceptional low-velocity performance, is the
unparalleled solution for high performance test, measurement,
inspection, and other demanding applications.
Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS130H
employs a center-driven, non-cogging linear motor as the driving
element. Since the linear motor is a direct-drive device, there
is no backlash, windup, or "stiction" that is normally
associated with a lead screw or ball-screw drive.
The linear motor drive also offers the advantage of higher speeds
and accelerations. The compact yet powerful linear motor drives
the ALS130H to a peak unloaded acceleration of 1 g and a maximum
velocity of 300 mm/s. The result is a high-performance stage with
outstanding throughput that significantly outperforms comparable
high-accuracy screw-driven stages.
Exceptional Resolution
For alignment applications, outstanding step-to-step resolution
is critical. The ALS130H meets this demand with a resolution of
0.5 nm when coupled with Aerotech controls.
The direct-drive linear motor allows the ALS130H to make precise,
small resolution steps. This is particularly important in alignment
applications where step accuracy is critical. Furthermore, the
linear motor and high resolution encoder system also provides
excellent in-position stability.
Superior Geometry
Aerotech's ultra-stiff construction and compact two-piece design
result in a stage with unmatched geometrical tolerances. As a
result, straightness and flatness for the standard stage is <±2
μm over the entire travel.
Smooth Travel
Designed for smooth, vibration-free motion, the ALS130H utilizes
precision anti-cage creep cross-roller bearings for outstanding
smoothness of motion. Since neither the bearing system nor the
drive system utilize any recirculating elements, the ALS130H exhibits
the outstanding ripple-free motion required for scanning and inspection
applications.
Designed for Long Life
Like all stages in the Aerotech product family, the ALS130H was
designed for outstanding long-term performance. Both the linear
motor and linear encoder are noncontact devices - they not only
exhibit long-life, but are totally maintenance free. A moving
magnet track design eliminates the need for cable management,
further improving long-term reliability.
Precision Alignment
ALS130H series stages are easily configured as XY assemblies.
Options include precision orthogonality alignment to 5 arc seconds
and available vertical axis solutions.
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