|
Total Travel |
25 mm (1 in) |
50 mm (2 in) |
100 mm (4 in) |
150 mm (6 in) |
|
Drive System |
Linear Brushless Servomotor (BLMUC-95-A) |
| Bus
Voltage |
Up
to 80 VDC with a single 25-pin D connector;
Up to 160 VDC with split feedback and power – two 25-pin
D connectors |
| Continuous
Current |
Apk |
2.94 |
| Arms |
2.08 |
|
Feedback |
Noncontact Linear Encoder |
|
Resolution |
0.0025 µm - 1.0 µm (0.1 µin - 40 µin) |
|
Maximum Travel Speed(1) |
300 mm/s (12 in/s) |
|
Maximum Linear Acceleration |
1g (10 m/s2) (384 in/s2) (No Load) |
|
Maximum Load(2) |
Horizontal |
12.0 kg (26.5 lb) |
|
Side |
10.0 kg (22.0 lb) |
|
Accuracy |
HALAR(3) |
±0.3 µm (±12 µin) |
|
Standard |
±2.0 µm (±80 µin) |
±2.0 µm (±80 µin) |
±4.0 µm (±160 µin) |
±6.0 µm (±240 µin) |
|
Repeatability |
±100 nm |
Straightness
and Flatness |
Maximum Deviation |
±1.0 µm (±40 µin) |
±1.0 µm (±40 µin) |
±1.5 µm (±60 µin) |
±2.0 µm (±80 µin) |
|
Pitch |
5 arc sec |
6 arc sec |
8 arc sec |
10 arc sec |
| Roll |
5 arc sec |
6 arc sec |
8 arc sec |
10 arc sec |
|
Yaw |
3 arc sec |
3 arc sec |
4 arc sec |
5 arc sec |
|
Nominal Stage Weight |
3.0 kg (6.5 lb) |
3.0 kg (6.5 lb) |
3.8 kg (8.4 lb) |
4.6 kg (10.1 lb) |
| Moving
Mass |
0.9 kg (2.0 lb) |
1.1 kg (2.4 lb) |
1.3 kg (2.9 lb) |
1.6 kg (3.5 lb) |
|
Construction |
Aluminum Body/Black Anodize Finish |