Home >> Linear Stages >> ALS135 Linear Stage

The ALS135, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.

Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or “stiction” that is normally associated with a lead screw or ball screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demand with a resolution of 10 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Superior Geometry
Aerotech’s ultra-stiff construction and compact two-piece design results in a stage with unmatched geometrical tolerances. As a result, straightness and flatness for the standard stage is <±2 µm over the entire travel. The effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.

Smooth Travel
Designed for smooth, vibration-free motion, the ALS135 exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Designed for Long Life
Like all stages in the Aerotech product family, the ALS135 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices — they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.

Precision Alignment
ALS135 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.