The ALS135, with its low profile and outstanding
performance characteristics, is the ultimate solution for high-accuracy
alignment and inspection stations.
Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS135
employs a center-driven, non-cogging linear motor as the driving
element. Since the linear motor is a direct-drive device, there
is no backlash, windup, or “stiction” that is normally
associated with a lead screw or ball screw drive.
The linear motor drive also offers the advantage of higher speeds
and accelerations. The compact yet powerful linear motor drives
the ALS135 to a peak unloaded acceleration of 1 g and a maximum
velocity of 300 mm/s. The result is a high-accuracy device with
outstanding throughput that significantly outperforms comparable
high-accuracy screw-driven stages.
Outstanding Resolution
For alignment applications, outstanding step-to-step resolution
is critical. The ALS135 meets this demand with a resolution of
10 nm when coupled with Aerotech controls. The direct-drive linear
motor allows the ALS135 to make precise, small resolution steps.
This is particularly important in alignment applications where
step accuracy is critical.
Superior Geometry
Aerotech’s ultra-stiff construction and compact two-piece
design results in a stage with unmatched geometrical tolerances.
As a result, straightness and flatness for the standard stage
is <±2 µm over the entire travel. The effects
of Abbe error are nearly eliminated, vastly improving overall
system accuracy.
Smooth Travel
Designed for smooth, vibration-free motion, the ALS135 exhibits
the outstanding ripple-free motion required for scanning and inspection
applications.
Designed for Long Life
Like all stages in the Aerotech product family, the ALS135 was
designed for outstanding long-term performance. Both the linear
motor and linear encoder are noncontact devices — they not
only exhibit long-life, but are totally maintenance free. A moving
magnet track design eliminates the need for cable management,
further improving long-term reliability.
Precision Alignment
ALS135 series stages are easily configured as XY assemblies. Options
include precision orthogonality alignment to 5 arc seconds and
available vertical axis solutions.
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