|
Total Travel |
25 mm (1 in) |
50 mm (2 in) |
100 mm (4 in) |
150 mm (6 in) |
200 mm (8 in) |
|
Drive System |
Linear Brushless Servomotor (BLMUC-95-A) |
| Bus
Voltage |
Up
to 80 VDC with a single 25-pin D connector;
Up to 160 VDC with split feedback and power — two 25-pin
D connectors |
| Continuous
Current |
Apk |
2.94 |
| Arms |
2.08 |
|
Feedback |
Noncontact Linear Encoder |
|
Resolution |
0.0025 µm - 1.0 µm (0.1µin - 40 µin) |
|
Maximum Travel Speed(1) |
300 mm/s (12 in/s) |
|
Maximum Linear Acceleration |
1 g (10 m/s2 ) (384 in/s2) (No Load) |
|
Maximum Load(2) |
Horizontal |
15.0 kg (33 lb) |
|
Side |
10.0 kg (22.0 lb) |
|
Accuracy |
HALAR(3) |
±0.3 µm (±12 µin) |
|
Standard |
±2.0µm (±80µin) |
±2.0µm
(±80µin) |
±4.0
µm (±160 µin) |
±6.0
µm (±240 µin) |
±8.0
µm (±320 µin) |
|
Repeatability(3) |
±100 nm (±4 µin) |
| Straightness
and Flatness |
Maximum
Deviation |
±1 µm |
±1.5 µm |
±1.5 µm |
±2 µm |
±2 µm |
| Pitch |
±5
arc sec |
±6
arc sec |
±8
arc sec |
±10
arc sec |
±12
arc sec |
| Roll |
±5
arc sec |
±6
arc sec |
±8
arc sec |
±10
arc sec |
±12
arc sec |
| Yaw |
±5
arc sec |
±5
arc sec |
±6
arc sec |
±7
arc sec |
±9
arc sec |
|
Nominal Stage Weight |
2.8 kg (6.2 lb) |
3.0 kg (6.5 lb) |
3.8 kg (8.4 lb) |
4.6 kg (10.1 lb) |
5.4 kg (11.9 lb) |
|
Moving Mass |
0.9 kg (2.0 lb) |
1 kg (2.2 lb) |
1.2 kg (2.6 lb) |
1.4 kg (3.1 lb) |
1.6 kg (3.5 lb) |
|
Construction |
Aluminum Body/Black Anodize Finish |
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