| Total Travel |
100 mm
(4 in) |
200 mm (8
in) |
300 mm
(12 in) |
450 mm
(18 in) |
600 mm (24
in) |
| Drive System |
Linear Brushless Servomotor (BLM-142-A) |
| Bus Voltage(1) |
Up
to 160 VDC |
| Continuous
Current(2) |
Apk |
Up
to 3.10 A |
| Arms |
Up
to 2.19 A |
| Feedback |
Noncontact Linear Encoder |
|
Resolution |
LN |
0.001 µm - 0.2 µm (0.04 µin - 8 µin) |
|
LT |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
| Maximum Travel
Speed(3) |
2 m/s (80 in/s) |
| Maximum Linear
Acceleration |
3 g (30 m/s2) (1152 in/s2) (No Load) |
|
Maximum Load(4) |
Horizontal |
70.0 kg (154.3 lb) |
|
Side |
35.0 kg (77.2 lb) |
|
Accuracy |
LN |
HALAR(5) |
±1.0 µm (±40 µin) |
|
Standard |
±5.0 µm (±200 µin) |
|
LT |
HALAR(5) |
±1.0 µm (±40 µin) |
|
Standard |
±4.0 µm
(±160 µin) |
±8.0 µm
(±320 µin) |
±12.0 µm
(±480 µin) |
±18.0 µm
(±720 µin) |
±24.0 µm
(±960 µin) |
|
Repeatability |
LN |
±0.5 µm (±20 µin) |
|
LT |
±0.5 µm (±20 µin) |
|
Straightness and Flatness |
Differential |
HALSF |
1 µm/25 mm (40 µin/in) |
|
Standard |
2 µm/25 mm (80 µin/in) |
|
Maximum Deviation |
HALSF |
±1.0 µm
(±40 µin) |
±1.5 µm
(±60 µin) |
±2.0 µm
(±80 µin) |
±2.5 µm (±100µin) |
±3.0 µm
(±120 µin) |
|
Standard |
±2.0 µm
(±80 µin) |
±4.0 µm
(±160 µin) |
±6.0 µm
(±240 µin) |
±9.0 µm
(±360 µin) |
±9.0 µm
(±360 µin) |
| Pitch and
Yaw |
5 arc sec |
8 arc sec |
12 arc sec |
17 arc sec |
20 arc sec |
| Nominal Stage
Weight |
13.5 kg (29.8 lb) |
17.5 kg (38.6 lb) |
21.0 kg (46.3 lb) |
27.0 kg (59.5 lb) |
32.5 kg (71.7 lb) |
| Moving Mass |
6.1 kg (13.4 lb) |
| Construction |
Aluminum Body/Black Anodize Finish/Hardcoat (62 Rockwell Hardness
Teflon® Impregnated) |