The demand for a high-accuracy, robust, open-frame
stage is met with the ALS3600. This dual-axis, large aperture,
open-frame stage addresses the unique needs of scanning microscopy,
wafer and printed circuit board inspection, and automated assembly.
Design and Construction
The ALS3600 is a three-piece design that allows critical components
such as orthogonality, straightness, and flatness to be controlled
during the initial machining. This results in a stage with exceptional
geometrical tolerances and inherent orthogonality.
The ALS3600 utilizes high-precision linear motion guide (LMG)
bearings, with a total of four trucks per axis. These make the
ALS3600 ideal for fast, repetitive operations. The LMG bearings
also exhibit exceptional stiffness, high load capacity, and extremely
low friction.
The high stiffness inherent in this stage allows it to be side-driven,
yet still retain excellent performance characteristics. The ALS3600
represents a major upgrade in performance over typical side-drive
stages.
Brushless Linear Servomotor
The ALS3600 incorporates a high power linear
motor to meet the needs of the most demanding applications.
This results in a stage with all of the advantages of a direct-drive
mechanism: zero backlash, no windup, exceptional acceleration,
zero friction, and outstanding servo stiffness. Many applications
require extreme stability of motion that can only be met with
a linear motor drive. Since the drivetrain has zero friction and
no recirculating elements, the ALS3600 is ideal for scanning,
imaging, and many other precision applications.
High-Accuracy Linear Encoder Feedback
The standard feedback device is a high-resolution, noncontact
linear encoder. This noncontact encoder offers exceptional repeatability
and stability over a range of operating conditions. Both digital
and analog output versions are available. The digital version
has a resolution of 1 µm, while the analog version, when
coupled with an Aerotech multiplier box, can reach resolutions
of 20 nm.
Alternate Configurations
All stage travels offer both single- and dual-axis designs, as
well as the option for a solid tabletop. Miniature microscope-size
stages are available, as are ball-screw-driven versions (please
refer to the ATS3600).
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