|
Total Travel |
100 mm (4 in) |
200 mm (8 in) |
300 mm (12 in) |
400 mm (16 in) |
|
Drive System |
Linear Brushless Servomotor (BLMFI-142-A) |
Bus
Voltage |
Up
to 320 VDC |
| Continuous
Current |
Apk |
Up
to 2.5 A |
| Arms |
Up
to 1.8 A |
|
Feedback |
Noncontact Linear Encoder |
|
Resolution |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
|
Maximum Travel Speed(1) |
300 mm/s (12 in/s) |
| Maximum
Linear Acceleration |
1
g (10 m/s2) (386 in/s2) (No Load) |
|
Maximum Load(2) |
90.0 kg (198.4 lb) |
|
Accuracy |
HALAR(3) |
±2.0 µm (±80 µin) |
|
Standard |
±4.0 µm (±160 µin) |
±8.0 µm (±320 µin) |
±12.0 µm (±480 µin) |
±16.0 µm (±640 µin) |
|
Repeatability |
±1.0 µm (±40 µin) |
|
Straightness and Flatness |
Differential |
1.0 µm/25 mm (40 µin/in) |
|
Maximum Deviation |
±2.0 µm (±80 µin) |
±4.0 µm (±160 µin) |
±6.0 µm (±240 µin) |
±8.0 µm (±320 µin) |
|
Pitch/Yaw |
10 arc sec |
15 arc sec |
18 arc sec |
20 arc sec |
|
Nominal Stage Weight |
30.0 kg (66.1 lb) |
45.0 kg (99.2 lb) |
58.0 kg (127.9 lb) |
76.0 kg (167.6 lb) |
| Moving
Mass (Lower X Axis) |
23.1
kg (51 lb) |
31.9
kg (70.3 lb) |
40.1
kg (88.5 lb) |
49.5
kg (109.2 lb) |
| Moving
Mass (Upper Y Axis) |
8.6
kg (19 lb) |
11.2
kg (24.7 lb) |
13.6
kg (30 lb) |
16.1
kg (35.6 lb) |
|
Construction |
Aluminum Body/Black Anodize Finish/Hardcoat |