|
Total Travel |
100 mm
(4 in) |
200 mm
(8 in) |
300 mm
(12 in) |
450 mm
(18 in) |
600 mm
(24 in) |
750 mm
(30 in) |
900 mm
(36 in) |
1000 mm
(40 in) |
|
Drive System |
Linear Brushless Servomotor - BLM-264-A |
| Bus
Voltage |
Up
to 320 VDC |
| Continuous
Current(1) |
Apk |
Up
to 5.10 A |
| Arms |
Up
to 3.61 A |
|
Feedback |
Noncontact Linear Encoder |
|
Resolution |
LN |
0.001 µm - 0.2 µm (0.04 µin - 8 µin) |
|
LT |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
|
Maximum Travel Speed(2) |
2 m/s (80 in/s) |
|
Maximum Linear Acceleration |
3 g (30 m/s2) (1152 in/s2) (No Load) |
|
Maximum Load(3) |
Horizontal |
135.0 kg (297.6 lb) |
|
Side |
45.0 kg (99.2 lb) |
|
Accuracy |
LN |
HALAR(4) |
±1.0 µm (± 40 µin) |
|
Standard |
±5.0 µm (± 200 µin) |
|
LT |
HALAR(4) |
±1.0 µm (±40 µin) |
|
Standard |
±4.0
µm
(±160 µin) |
±8.0 µm
(±320 µin) |
±12.0 µm
(±480 µin) |
±18.0 µm
(±720 µin) |
±24.0 µm
(±960 µin) |
±30.0 µm
(±1200 µin) |
±36.0 µm
(±1440 µin) |
±40.0 µm
(±1600 µin) |
|
Repeatability |
LN |
±0.5 µm (±20 µin) |
|
LT |
±0.5 µm (±20 µin) |
Straightness
and Flatness |
Differential |
HALSF |
1 µm/25 mm (40 µin/in) |
|
Standard |
2 µm/25 mm (80 µin/in) |
|
Maximum Deviation |
HALSF |
±0.5 µm
(±20 µin) |
±1.0 µm
(±40 µin) |
±1.5 µm
(±60 µin) |
±2.5 µm
(±100 µin) |
±3.0 µm
(±120 µin) |
±3.5 µm
(±140 µin) |
±4.5 µm
(±180 µin) |
± 5.0 µm
(± 200 µin) |
|
Standard |
±1.0 µm
(±40 µin) |
±2.0 µm
(±80 µin) |
±3.0 µm
(±120 µin) |
±4.0 µm
(±160 µin) |
±6.0 µm
(±240 µin) |
±7.0 µm
(±280 µin) |
±8.0 µm
(±320 µin) |
± 9.0 µm
(± 360 µin) |
|
Pitch and Yaw |
6
arc sec |
8 arc sec |
10 arc sec |
14 arc sec |
17 arc sec |
20 arc sec |
25 arc sec |
25 arc sec |
|
Nominal Stage Weight |
35.0
kg
(77.2 lb) |
40.0 kg
(88.2 lb) |
45.0 kg
(99.2 lb) |
52.0 kg
(114.6 lb) |
60.0 kg
(132.3 lb) |
68.0 kg
(149.9 lb) |
76.0 kg
(167.6 lb) |
81.3 kg
(179.1 lb) |
|
Moving Mass |
12.21 kg (26.92 lb) |
|
Construction |
Stage |
Aluminum Body; Textured Epoxy (Polane-T) Pebble Grey Paint |
|
Table and Waycover |
Hard Coating (62 Rockwell Hardness Teflon®
Impregnated) |
United
States [Change]
