| Total Travel |
450 mm
(18 in) |
600 mm
(24 in) |
750 mm
(30 in) |
900 mm
(36 in) |
1000 mm
(40 in) |
| Drive System |
Dual Linear Brushless Servomotors (BLM-325-A) |
| Bus Voltage |
Up
to 320 VDC |
| Continuous
Current(1) |
Apk |
Up
to 10.00 A |
| Arms |
Up
to 7.1 A |
| Feedback |
Noncontact Linear Encoder |
|
Resolution |
LN |
0.001 µm - 0.2 µm (0.04 µin - 8 µin) |
|
LT |
0.005 µm - 1.0 µm (0.2 µin - 40 µin) |
| Maximum Travel
Speed(2) |
2 m/s (80 in/s) |
| Maximum Linear
Acceleration |
3 g (30 m/s2) (1152 in/s2) (No Load) |
|
Maximum Load(3) |
Horizontal |
135.0 kg (297.6 lb) |
|
Side |
45.0 kg (99.2 lb) |
|
Accuracy |
LN |
HALAR(4) |
±1.0 µm (±40 µin) |
|
Standard |
±5.0 µm (±200 µin) |
|
LT |
HALAR(4) |
±1.0 µm (±40 µin) |
|
Standard |
±18.0 µm
(±720 µin) |
±24.0 µm
(±960 µin) |
±30.0 µm
(±1200 µin) |
±36.0 µm
(±1440 µin) |
±40.0 µm
(±1600 µin) |
|
Repeatability |
LN |
±0.5 µm (±20 µin) |
|
LT |
±0.5 µm (±20 µin) |
|
Straightness and Flatness |
Differential |
HALSF |
1 µm/25 mm (40 µin/in) |
|
Standard |
2 µm/25 mm (80 µin/in) |
|
Maximum Deviation |
HALSF |
±2.5 µm
(±100 µin) |
±3.0 µm
(±120 µin) |
±3.5 µm
(±140 µin) |
±4.5 µm
(±180 µin) |
±5.0 µm
(±200 µin) |
|
Standard |
±4.0 µm
(±160 µin) |
±6.0 µm
(±240 µin) |
±7.0 µm
(±280 µin) |
±8.0 µm
(±320 µin) |
±9.0 µm
(±360 µin) |
| Pitch and
Yaw |
14 arc sec |
17 arc sec |
20 arc sec |
25 arc sec |
25 arc sec |
| Nominal Stage
Weight |
73.5 kg
(162.0 lb) |
120.0 kg
(264.6 lb) |
131.5 kg
(289.9 lb) |
145.0 kg
(319.7 lb) |
153.0 kg
(337.3 lb) |
| Moving Mass |
28.7
kg (63.3 lb) |
|
Construction |
Stage |
Aluminum Body; Textured Epoxy (Polane-T) Pebble Grey Paint |
|
Table and Waycover |
Hard Coating (62 Rockwell Hardness Teflon®
Impregnated) |