| Available in X, XY,
XYZ, and other combinations
2.5 nm linear resolution with Automation 3200
Turnkey drive and control electronics
Noncontact, non-cogging, direct-drive
Ultra-quiet linear servo drives
High speed, real-time axis calibration
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Introduction
Aerotech’s Nano-Translation (ANT™) stages are the
best-in-class in combining speed, accuracy, resolution, repeatability,
reliability, and size. No other automation tool manufacturer has
successfully combined all of these features into a single product
designed to meet the rigors of a 24/7 manufacturing environment.
The Aerotech Nano-Translation stage series is ready to take your
manufacturing alignment or test process to the next level.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate,
and high-speed positioning necessary for mass production of precision
devices. ANT stages utilize advanced direct-drive technology pioneered
by Aerotech to achieve the highest level of positioning performance.
Aerotech direct-drive technology is high-performance, non-cogging,
noncontact, high-speed, high-resolution, and high-accuracy. This
unique drive technology offers a significant (several times higher)
throughput advantage over conventional screw and piezo-drive-based
systems.
Linear and Rotary Solutions
The ANT series consists of both linear and rotary components.
The ANT-25L and ANT-50L stages can be mounted flat or on edge
for maximum flexibility. ANT-25L/-50L linear stages can be combined
with other ANT series (vertical lift, rotary, goniometer) in numerous
configurations to create motion platforms tailored to meet specific
process requirements.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. ANT’s industry-leading
resolution — 5 nanometer closed-loop resolution on linear
stages, 2 nm resolution for vertical lift stages, and 0.027 arc sec
resolution for rotary stages — provides this high level
of performance. Advanced real-time axis calibration systems allow
the highest level of system accuracy. High-speed, 32 megahertz
electronic circuitry enables extremely fast positioning, over
250 mm per second, even at 5 nanometer resolution. Excellent in-position
stability, assisted by high-quality, no-creep linear bearings,
enables virtually maintenance-free operation over the life of
the product. Aerotech’s direct-drive technology has no hysteresis
or backlash, enabling accurate and repeatable nanometer-scale
motion.
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