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Total Travel |
25 mm (1 in) |
50 mm (2 in) |
|
Drive System |
Linear Brushless Servomotor |
|
Bus Voltage |
Up to 80 VDC |
|
Continuous
Current, No Cooling |
Apk |
3.10 |
2.94 |
|
Arms |
2.19 |
2.08 |
BEMF,
line-line, max |
V/m/sec |
2.86 |
3.78 |
V/in/sec |
0.07 |
0.10 |
Force
Constant, Sinusoidal Drive |
N/Apk (lb/Apk) |
2.48
(0.56) |
3.29
(0.74) |
|
N/Arms (lb/Arms) |
3.51
(0.79) |
4.65
(1.05) |
Resistance,
25°C, line-line |
Ohms |
4.0 |
5.2 |
Resistance,
125°C, line-line |
Ohms |
5.6 |
7.3 |
Inductance,
line-line |
mH |
0.51 |
0.70 |
Magnetic
Pole Pitch |
mm
(inch) |
16.00
(0.63) |
Feedback |
Noncontact
Linear Encoder |
Resolution |
0.0025
µm - 1.0 µm (0.1 µin - 40 µin) (20
µm pitch encoder) |
Maximum
Travel Speed |
250
mm/s (10 in/s) |
|
Maximum Linear Acceleration(2) |
1.0
g |
Maximum
Load
|
Horizontal |
5.0
kg (11 lb) |
| Side |
2.0
kg (4.4 lb) |
|
Accuracy |
Standard |
±3.0
µm (±160 µin) |
±5.0
µm (±240 µin) |
| HALAR(3)
|
±0.3
µm |
|
Repeatability |
±100 nm |
±125
nm |
|
Straightness and Flatness |
Differential |
±1.0
µm/25 mm |
| Max
Deviation |
±1.0 µm |
±2.0
µm |
|
Pitch and Roll |
±6
arc sec |
±12
arc sec |
| Yaw |
±4
arc sec |
±8
arc sec |
| Nominal
Stage Weight |
0.8
kg (1.8 lb) |
1.2
kg (2.7 lb) |
| Moving
Mass |
0.46
kg (1.0 lb) |
0.52
kg (1.1 lb) |
|
Construction |
Aluminum Body/Black Anodize Finish/Hardcoat |
Note:
1. All performance and electrical motor specifications ±10%.
2. Acceleration is payload dependent.
3. Values for single axis stages 25 mm above the table top with
Aerotech controls and HAL option.
4. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
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United
States [Change]
