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| Total Travel
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25 mm (1 in) |
50 mm (2 in) |
| Drive System
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Linear Brushless Servomotor |
| Bus Voltage
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Up to 80 VDC |
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Continuous Current |
Apk |
up to 3.1 A |
up to 2.9 A |
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Arms |
up to 2.2 A |
up to 2.1 A |
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BEMF, line-line, max |
V/m/sec |
2.86 |
3.78 |
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V/in/sec |
0.073 |
0.096 |
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Force Constant, Sinusoidal Drive |
N/A (lb/A), pk |
2.48 (0.56) |
3.29 (0.74) |
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NA (lb/A), rms |
3.51 (0.79) |
4.65 (1.04) |
| Resistance, 25°C,
line-line |
Ohms |
4 |
5.2 |
| Resistance, 125°C,
line-line |
Ohms |
5.6 |
7.28 |
| Inductance, line-line |
mH |
0.51 |
0.70 |
| Magnetic Pole
Pitch |
mm (inch) |
16 (0.63) |
| Feedback |
Noncontact Linear Encoder |
| Resolution |
0.0025 µm - 1 µm (0.1 µin - 40 µin) |
| Maximum
Travel Speed(1) |
500 mm/s (8 in/s) |
| Maximum Linear
Acceleration |
5 g - 50 m/s2 (no load) |
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Maximum Load(2) |
Horizontal |
8.0 kg (18 lb) |
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Side |
5.0 kg (11 lb) |
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Accuracy |
Standard |
±3.0 µm (±120 µin) |
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HALAR(3) |
±0.3 µm (±12 µin) |
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Repeatability |
Standard |
±0.1 µm (±4 µin) |
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HALAR(3) |
±0.05 µm (±2 µin) |
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Straightness and Flatness(4) |
Differential |
±0.5 µm/25 mm (±20 µin/in) |
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Max Deviation |
±1.5 µm (±60 µin) |
±2.0
µm (±80 µin) |
| Pitch and Yaw(5) |
5 arc sec |
| Nominal Stage
Weight |
0.8 kg (1.8 lb) |
1.2 kg (2.7 lb) |
| Moving Mass |
0.46 kg (1.0 lb) |
0.52 kg (1.1 lb) |
| Construction |
Aluminum Body/Black Anodize Finish/Hardcoat |
Notes:
1. Maximum speed based on stage capability; maximum application
velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability; maximum application
load may be limited by acceleration requirements.
3. Available with Aerotech controllers.
4. Specifications (especially flatness) apply under light loading
only.
5. Value applies to unloaded stage.
6. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications. |
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