Introduction
Aerotech’s Nanotranslation Crossed-Roller Vertical
(ANT-LXV) stages combine speed, accuracy, resolution,
repeatability, and reliability within an extremely small
footprint. ANT-LXV linear stages offer 2.5 nm resolution,
1 g acceleration, 500 mm/s velocity, 5 kg load capacity, and
a standardized universal-base mounting pattern that allows
the use of this flexible stage family in a wide range of
configurations.
Noncontact Direct-Drive
ANT-LXV stages utilize advanced direct-drive technology
pioneered by Aerotech to achieve the highest level of
positioning performance. This direct-drive technology is
non-cogging, noncontact, high-speed, high-resolution, and
high-accuracy, and the use of crossed-roller bearing
elements allows high precision, smaller incremental moves
to be accomplished reliably and repeatably. This unique
drive and bearing combination, packaged in an extremely
small-profile footprint, offers tangible advantages in many
applications such as fiber alignment, optical delay element
actuation, and scanning applications that demand smooth
motion.
Flexible System Design
The ANT-LXV family has universal mounting and tabletop
patterns that allow for easy system integration. It can be
easily combined with other Aerotech stages to create multi-axis
configurations.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT-LXV offers industry-leading
2.5 nm or better closed-loop resolution, while advanced, real-time
axis calibration systems allow the highest level of system accuracy.
High speed, 40 MHz electronic circuitry enables extremely fast
positioning, over 500 mm per second, even at 2.5 nanometer resolution.
Excellent in-position stability, assisted by high-quality, crossed-roller
linear bearings, enables virtually maintenance-free operation
over the life of the product. Aerotech’s direct-drive technology
has no hysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.
ANT-LXV stages include an anti-stiction pneumatic
counterbalance to hold position against gravity with very
little motor current. An integrated precision regulator
allows fine adjustment for a range of payloads.
|
