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| Total Travel |
25 mm (1 in) |
50 mm (2 in) |
| Drive System |
Linear Brushless Servomotor |
| Bus Voltage |
up to 80 VDC |
| Continuous Current |
Apk |
up to 3.1 A |
up to 2.9 A |
| Arms |
up to 2.2 A |
up to 2.1 A |
| BEMF, line-line, max. |
V/m/sec |
2.86 |
3.78 |
| V/in/sec |
0.073 |
0.096 |
| Force Constant, Sinusoidal Drive |
N/A (lb/A), pk |
2.48 (0.56) |
3.29 (0.74) |
| N/A (lb/A), rms |
3.51 (0.79) |
4.65 (1.04) |
| Resistance, 25°C, line-line |
Ohms |
4 |
5.2 |
| Resistance, 125°C, line-line |
Ohms |
5.6 |
7.28 |
| Inductance, line-line |
mH |
0.51 |
0.70 |
| Magnetic Pole Pitch |
mm (inch) |
16 (0.63) |
| Feedback |
Noncontact Linear Encoder |
| Resolution |
0.0025 µm - 1 µm (0.1 µin - 40 µin) |
| Maximum Travel Speed(1) |
500 mm/s (8 in/s) |
| Maximum Linear Acceleration |
1 g (10 m/s2) (no load) |
| Maximum Load(2)(3) |
Vertical |
5.0 kg (11 lb) |
| Accuracy |
Standard |
±4.0
µm (±160 µin) |
| HALAR(4) |
±0.3 µm (±12 µin) |
| Repeatability |
Standard |
±0.1 µm (±4 µin) |
| HALAR(4) |
±0.05 µm (±2 µin) |
| Straightness and Flatness(5) |
Differential |
±0.75 µm/25 mm (±30 µin/in) |
| Max Deviation |
±2.25 µm (±90 µin) |
±3.0 µm (±120 µin) |
| Pitch and Yaw(6) |
7 arc sec |
| Nominal Stage Weight |
0.8 kg (1.8 lb) |
1.2 kg (2.7 lb) |
| Moving Mass |
0.46 kg (1.0 lb) |
0.52 kg (1.1 lb) |
| Construction |
Aluminum Body/Black Anodize Finish/Hardcoat |
Notes:
1. Maximum speed based on stage capability; maximum
application velocity may be limited by system data rate and system resolution.
2. Maximum load based on bearing capability and
counterbalance capacity; maximum application load may be limited by
acceleration requirements.
3. Load is counterbalanced by a pneumatic cylinder. Air
supply must be filtered, dry, oil-less air (minimum 5 µm coalescing filter).
The force factor for the cylinder is
452.5 N/MPa (0.307 lb/psi).
4. Available with Aerotech controllers.
5. Specifications (especially flatness) apply under light
loading only.
6. Value applies to unloaded stage.
7. Specifications are for single-axis systems, measured 50
mm above the tabletop. Performance of multi-axis systems is payload and
workpoint dependent. Consult factory for multi-axis or non-standard
applications.
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