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Total Travel |
±360° Continuous |
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Shaft Diameter |
19 mm |
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Shaft Thread |
0.7500-32NS-3 |
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Maximum Aperture Diameter |
14 mm ±0.5 mm |
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Drive System |
Direct-Drive Brushless Servomotor |
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Feedback |
2048 cycles/rev; analog output encoder (standard) |
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Maximum Rotary Speed(1) |
2000 rpm |
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Accuracy(1) |
±72.8 µrad (±15 arc sec) |
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Repeatability(1) |
±14.6 µrad (±3 arc sec) |
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Inertia |
9.0 x 10-5 kg-m2 (0.0130 oz-in-s2) |
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Nominal Stage Weight |
4.4 kg (9.7 lb) |
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Maximum Load |
Axial |
3.0 kg (6.6 lb) |
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Moment |
5 N-m |
| Motor
Type |
BM250 |
| Continuous
Current, Stall |
Apk |
10 |
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Arms |
7.1 |
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Bus Voltage |
Up to 320 VDC |
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Axis Error Motion |
Axial |
2.5 µm (100 µin) |
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Radial |
5.0 µm (200 µin) |
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Material |
Stage Shaft |
Stainless Steel |
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Stage Body |
Aluminum |
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Finish |
Stage Shaft |
Stainless Steel |
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Stage Body |
Black Anodize |
Notes:
1. Maximum speed based on stage capability; maximum application
velocity may be limited by system data rate and system resolution

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