The ATS100 series motor-driven linear stages provide
the high resolution and repeatability required for semiconductor
wafer testing and fabrication, automated microscope inspection
systems, and precision micromachining applications.
Outstanding Construction Features
ATS100 series stages are machined from a special cast aluminum
alloy to provide a high strength-to-weight ratio, and long-term
stability. The base is a box design that provides exceptional
stiffness and stability.
ATS100 series stages employ a precision-ground ball screw pre-loaded
to eliminate backlash, and its nut has wipers to prevent contamination
and maintain high accuracy throughout the life of the stage. High-quality,
pre-loaded duplex bearings are used to eliminate axial play.
All ATS100 series stages incorporate Linear Motion Guide (LMG)
bearings to provide high load capability and high stiffness. The
LMG design provides a compact stage with continuous carriage support
over the entire travel and good cantilevered load capability.
Integral wipers on the bearing trucks help ensure stage travel
life. Highly accurate optical limit switches and end stops are
also standard.
Integral bellows-type waycovers protect the drive and bearing
system from contamination. Metal surfaces are protected with an
attractive clear anodized finish. Both metric (standard) and English
mounting and bolt-hole patterns are available.
High Accuracy
The ATS100 sets the standard for precision performance in a compact
package. With the HALAR option, the ATS100 is capable of submicron
accuracy and an impressive repeatability of 0.3 µm.
Motors and Drives
Included with the ATS100 series stages are Aerotech’s BMS
series brushless rotary motors. This motor has all of the advantages
of a brushless motor – high acceleration, no brushes to
wear, and lower heating – yet has zero cogging for extremely
smooth motion and accuracy. Aerotech manufactures a wide range
of matching drives and controls to provide a fully integrated
and optimized motion solution.
Options
Standard options include a precision right-angle bracket for multi-axis
assembly, and vacuum preparation to 10-6 torr.
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