| Total Travel |
100 mm |
150 mm |
200 mm |
300 mm |
| Drive System |
Precision Ball Screw/Brushless Servomotor (BMS60-A-D25-E2000H) |
| Bus Voltage |
Up
to 160 VDC |
Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
Feedback |
Noncontact
Rotary Encoder (2000 line) |
Resolution |
8 mm/rev lead |
1.0
µm @ 2000 steps/rev Motor Resolution |
Maximum
Travel Speed(1) |
400
mm/s |
Maximum
Load(2) |
50
kg (horizontal); 25 kg (vertical); 50 kg (side) |
|
Accuracy |
Standard |
±4 µm |
±6 µm |
±8 µm |
±12 µm |
|
HALAR(3) |
±1.0 µm |
| Repeatability
(Bidirectional) |
±1.0 µm standard; ±0.5 µm with HALAR(3) |
| Straightness
and Flatness |
±2.4 µm |
±3.6 µm |
±4.8 µm |
±7.2 µm |
|
Nominal Stage Weight (with motor) |
ATS1000 |
7.2 kg (15.9 lb) |
7.7 kg (16.9 lb) |
NA |
9.4 kg (20.7 lb) |
|
ATS1000-B |
8.1 kg (17.8 lb) |
8.7 kg (19.1 lb) |
NA |
10.8 kg (23.8 lb) |
|
ATS1000-H |
8.0 kg (17.7 lb) |
8.7 kg (19.1 lb) |
9.4 kg (20.6 lb) |
11.0 kg (24.2 lb) |
| Construction |
Black
Anodized Aluminum Body with Hardcoated Tabletop |
| Total Travel |
400 mm |
450 mm |
500 mm |
600 mm |
| Drive System |
Precision Ball Screw/Brushless Servomotor (BMS60-A-D25-E2000H) |
| Bus Voltage |
Up
to 160 VDC |
Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
Feedback |
Noncontact
Rotary Encoder (2000 line) |
Resolution |
8 mm/rev lead |
1.0
µm @ 2000 steps/rev Motor Resolution |
Maximum
Travel Speed(1) |
400
mm/s |
Maximum
Load(2) |
50
kg (horizontal); 25 kg (vertical); 50 kg (side) |
|
Accuracy |
Standard |
±16
µm |
±18
µm |
±20
µm |
±24
µm |
|
HALAR(3) |
±1.0 µm |
| Repeatability
(Bidirectional) |
±1.0 µm standard; ±0.5 µm with HALAR(3) |
| Straightness
and Flatness |
±9.6 µm |
±10.8 µm |
±12.0 µm |
±14.4 µm |
|
Nominal Stage Weight (with motor) |
ATS1000 |
10.4 kg (22.9 lb) |
11.0 kg (24.2 lb) |
NA |
12.6 kg (27.7 lb) |
|
ATS1000-B |
12.4 kg (27.3 lb) |
13.4 kg (29.5 lb) |
NA |
15.5 kg (34.1 lb) |
|
ATS1000-H |
12.3 kg (27.1 lb) |
NA |
13.9 kg (30.5 lb) |
15.4 kg (33.9 lb) |
| Construction |
Black
Anodized Aluminum Body with Hardcoated Tabletop |