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| Total Travel |
50 mm (2 in) |
100 mm (4 in) |
150 mm (6 in) |
200 mm (8 in) |
| Drive System |
Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H) |
| Bus Voltage |
Up
to 160 VDC |
| Continuous
Current |
Apk |
Up
to 2.3 A |
| Arms |
Up
to 1.6 A |
Feedback |
Noncontact
Rotary Encoder (1000 line) |
| Resolution |
2 mm/rev lead |
0.5 µ m (20 µ in) @ 4000 steps/rev Motor Resolution |
| Maximum Travel
Speed(1) |
100 mm/s (4 in/s) |
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Maximum Load(2) |
Horizontal |
25.0 kg (55.1 lb) |
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Vertical |
10.0 kg (22.0 lb) |
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Side |
10.0 kg (22.0 lb) |
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Accuracy |
HALAR(3) |
±0.5 µm (±20 µin) |
±0.5 µm (±20 µin) |
±0.75 µm (±30 µin) |
±1.0 µm (±40 µin) |
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Standard |
±2.0 µm (±80 µin) |
±3.0µm (±120µin) |
±5.0 µm (±200 µin) |
±6.0 µm (±240 µin) |
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Repeatability (Bidirectional) |
HALAR(3) |
± 0.3 µm (±12 µin) |
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Standard |
± 0.7 µm (±30 µin) |
Straightness and
Flatness |
Differential |
HALSF |
1.0 µm/25 mm (40 µin/in) |
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Standard |
2.0 µm/25 mm (80 µin/in) |
Maximum
Deviation |
HALSF |
±0.5 µm (±20 µin) |
± 1.0 µm (±40 µin) |
±1.5 µm (±60 µin) |
±1.75 µm (±70 µin) |
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Standard |
±1.0 µm (±40 µin) |
±2.0 µm (±80 µin) |
±2.0 µm (±80 µin) |
±3.0 µm (±120 µin) |
| Pitch and
Yaw |
5 arc sec |
8 arc sec |
10 arc sec |
12 arc sec |
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Nominal Stage Weight |
Less Motor |
1.6 kg (3.5 lb) |
1.7 kg (3.7 lb) |
1.8 kg (4.0 lb) |
2.0 kg (4.4 lb) |
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With Motor |
2.7 kg (6.0 lb) |
2.8 kg (6.2 lb) |
2.9 kg (6.4 lb) |
3.1 kg (6.8 lb) |
| Construction |
Aluminum Body/Stage and Table; Clear Anodize Finish |
Notes:
1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single axis systems and based
on ball screw and bearing life of 2500 km (100 million inches) of
travel.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems, measured 50 mm above
the tabletop. Performance of multi-axis systems is payload and workpoint
dependent. Consult factory for multi-axis or non-standard applications.
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United
States [Change]
